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Keywords = direct laser-writing

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49 pages, 3153 KB  
Review
Laser-Based Fabrication of Hydrogel Scaffolds for Medicine: From Principles to Clinical Applications
by Dan Stefan Manoliu, Cristian Zagar, Irina Negut and Anita Ioana Visan
Gels 2025, 11(10), 811; https://doi.org/10.3390/gels11100811 - 9 Oct 2025
Abstract
Hydrogel scaffolds have emerged as pivotal materials in regenerative medicine due to their biocompatibility, tunable mechanical properties, and ability to mimic the extracellular matrix. However, conventional fabrication techniques often lack the precision required to create complex architectures, limiting their effectiveness in tissue engineering. [...] Read more.
Hydrogel scaffolds have emerged as pivotal materials in regenerative medicine due to their biocompatibility, tunable mechanical properties, and ability to mimic the extracellular matrix. However, conventional fabrication techniques often lack the precision required to create complex architectures, limiting their effectiveness in tissue engineering. This review explores advanced laser-based fabrication methods, such as two-photon polymerization, laser-induced forward transfer, selective laser sintering/melting, and laser direct writing, which offer unparalleled resolution and control over scaffold geometry. These techniques enable the production of intricate 3D structures tailored to specific clinical needs, from vascular networks to patient-specific implants. We analyze the principles, advantages, and limitations of each method, highlighting their biomedical applications and the challenges of scalability, material compatibility, and cost. By bridging the gap between laboratory research and clinical implementation, laser-based technologies hold significant promise for advancing personalized medicine and tissue regeneration. Full article
(This article belongs to the Special Issue Hydrogel-Based Scaffolds with a Focus on Medical Use (3rd Edition))
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5 pages, 448 KB  
Editorial
Direct Femtosecond Laser Writing of Micro-Optical Components
by Alessandra Nardini, Rebeca Martínez Vázquez and Behjat Sadat Kariman
Micromachines 2025, 16(10), 1142; https://doi.org/10.3390/mi16101142 - 4 Oct 2025
Viewed by 424
Abstract
Direct femtosecond laser writing (DLW), also known as two-photon polymerization (2PP), emerged as a true 3D micro/nano-structuring method in 1997 when Mauro and co-workers first demonstrated infrared femtosecond laser photopolymerization of a UV-curable resist [...] Full article
(This article belongs to the Section A1: Optical MEMS and Photonic Microsystems)
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14 pages, 4889 KB  
Article
Preparation of Microlens Array Using Excimer Laser Motion Mask
by Libin Wang and Tao Chen
Appl. Sci. 2025, 15(19), 10664; https://doi.org/10.3390/app151910664 - 2 Oct 2025
Viewed by 145
Abstract
In order to optimize the preparation process of microlens arrays, improve preparation efficiency, and reduce preparation costs, 248 nm KrF excimer laser direct writing is combined with a motion mask to prepare microlens arrays on PMMA substrates. Firstly, a specific exposure mask based [...] Read more.
In order to optimize the preparation process of microlens arrays, improve preparation efficiency, and reduce preparation costs, 248 nm KrF excimer laser direct writing is combined with a motion mask to prepare microlens arrays on PMMA substrates. Firstly, a specific exposure mask based on the contour characteristics of the microlens unit was designed, and the preparation principle was analyzed. Using COMSOL Multiphysics 6.3 simulation software, a microlens preparation model was built to intuitively describe the process of preparing microlenses by the motion mask method. Secondly, a preparation system was built, and the laser processing technology was optimized. Finally, microlens arrays were prepared based on the optimized process, and an optical microscope and white-light interferometer were used to observe their morphology. The experimental results show that this method can effectively prepare cylindrical and circular microlens arrays. The width of the cylindrical microlens array unit exceeded 90 μm, the height was 7.08 μm, and the roughness was 0.09 μm. The diameter of the circular microlens array unit was φ100 μm, the height was 4 μm, and the curvature radius was 230 μm. The geometric dimensions of the mask can be adjusted to obtain microlens units of the desired size, achieving personalized preparation of microlens arrays. The excimer laser motion mask method can prepare various types of microlens arrays, and the array units have a high consistency and high surface quality, which helps to improve the efficiency, flexibility, stability, and specificity of microlens array preparation. Full article
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27 pages, 10691 KB  
Article
Improved Bioactivity of Titanium-Based Surfaces Fabricated by Laser Melting Deposition by Functionalization with 3D Polymeric Microstructures Produced by Laser Direct Writing via Two-Photon Polymerization
by Bogdan Stefanita Calin, Roxana Cristina Popescu, Roxana Gabriela Ghita, Eugenia Tanasa, Sabin Mihai and Irina Alexandra Paun
Polymers 2025, 17(19), 2620; https://doi.org/10.3390/polym17192620 - 27 Sep 2025
Viewed by 271
Abstract
Titanium (Ti)-based implants are widely used for bone injuries but suffer from poor bioactivity. To address this, we propose an innovative synergistic approach that combines laser melting deposition (LMD) for the fabrication of titanium-based supports with laser direct writing via two-photon polymerization (LDW [...] Read more.
Titanium (Ti)-based implants are widely used for bone injuries but suffer from poor bioactivity. To address this, we propose an innovative synergistic approach that combines laser melting deposition (LMD) for the fabrication of titanium-based supports with laser direct writing via two-photon polymerization (LDW via TPP) for their functionalization with 3D polymeric microstructures. We functionalized Ti surfaces fabricated by LMD using Ti (99.85 wt.%) and TiC powders (79.95 wt.% Ti, 20.05 wt.% C), with 3D microstructures obtained by LDW via TPP. The 3D microstructures were made of IP-Dip photopolymer and comprised 64 vertical microtubes arranged in five layers (10 to 170 μm tall, >94% porosity). When seeded with MG-63 osteoblast-like cells, the Ti-based surfaces functionalized with 3D polymeric microstructures promoted 3D cells’ spatial organization. Moreover, the cells seeded on functionalized Ti-based surfaces showed earlier organic matrix synthesis (day 7 vs. day 14) and mineralization (higher deposits of calcium and phosphorus, starting from day 7), as compared with the cells from non-functionalized Ti. In addition, the traction forces exerted by the cells on the 3D microstructures, determined using FEBio Studio software, were of the order of hundreds of µN, whereas if the cells would have been seeded on extracellular matrix-like materials, the traction forces would have been of only few nN. These results point towards the major role played by 3D polymeric microarchitectures in the interaction between osteoblast-like cells and Ti-based surfaces. Overall, the functionalization of Ti-based constructs fabricated by LMD with 3D polymeric microstructures made by LDW via TPP significantly improved Ti bioactivity. Full article
(This article belongs to the Special Issue Laser Treatment of High-Polymer Materials)
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53 pages, 2691 KB  
Review
Heterogeneous Integration Technology Drives the Evolution of Co-Packaged Optics
by Han Gao, Wanyi Yan, Dan Zhang and Daquan Yu
Micromachines 2025, 16(9), 1037; https://doi.org/10.3390/mi16091037 - 10 Sep 2025
Viewed by 1512
Abstract
The rapid growth of artificial intelligence (AI), data centers, and high-performance computing (HPC) has increased the demand for large bandwidth, high energy efficiency, and high-density optical interconnects. Co-packaged optics (CPO) technology offers a promising solution by integrating photonic integrated circuits (PICs) directly within [...] Read more.
The rapid growth of artificial intelligence (AI), data centers, and high-performance computing (HPC) has increased the demand for large bandwidth, high energy efficiency, and high-density optical interconnects. Co-packaged optics (CPO) technology offers a promising solution by integrating photonic integrated circuits (PICs) directly within or close to electronic integrated circuit (EIC) packages. This paper explores the evolution of CPO performance from various perspectives, including fan-out wafer level packaging (FOWLP), through-silicon via (TSV)-based packaging, through-glass via (TGV)-based packaging, femtosecond laser direct writing waveguides, ion-exchange glass waveguides, and optical coupling. Micro ring resonators (MRRs) are a high-density integration solution due to their compact size, excellent energy efficiency, and compatibility with CMOS processes. However, traditional thermal tuning methods face limitations such as high static power consumption and severe thermal crosstalk. To address these issues, non-volatile neuromorphic photonics has made breakthroughs using phase-change materials (PCMs). By combining the integrated storage and computing capabilities of photonic memory with the efficient optoelectronic interconnects of CPO, this deep integration is expected to work synergistically to overcome material, integration, and architectural challenges, driving the development of a new generation of computing hardware with high energy efficiency, low latency, and large bandwidth. Full article
(This article belongs to the Special Issue Emerging Packaging and Interconnection Technology, Second Edition)
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9 pages, 2158 KB  
Communication
Ultrafast Laser Writing of In-Line Filters Based on MZI
by Longwang Xiu, Yanfei Liu, Xinyu Hu, Yuxi Pang and Xiangdong Cao
Photonics 2025, 12(9), 889; https://doi.org/10.3390/photonics12090889 - 4 Sep 2025
Viewed by 685
Abstract
In mode-locked fiber lasers and optical sensors, in-line filters are essential components. Fiber-core Mach–Zehnder interferometer (MZI) technology has garnered a lot of research interest for the several manufacturing techniques for in-line MZI filters. Although multi-line inscription is frequently needed in existing methods to [...] Read more.
In mode-locked fiber lasers and optical sensors, in-line filters are essential components. Fiber-core Mach–Zehnder interferometer (MZI) technology has garnered a lot of research interest for the several manufacturing techniques for in-line MZI filters. Although multi-line inscription is frequently needed in existing methods to attain enough waveguide width, this approach adds complexity to production and may result in compromised waveguide quality. In this work, we present an improved single-line direct-writing method that attains similar MZI filtering results to multi-line scan. Additionally, the MZI filter created with the modified single-line direct-writing technique has a smaller insertion loss and requires less direct-writing energy than the previous single-line direct-writing technique. A 516 μm long MZI-based in-line filter was successfully constructed. The results of the characterization showed a central loss dip at 1089.82 nm, a free-spectral range (FSR) of 141.36 nm, an extinction ratio of 19.69 dB, and an insertion loss of 1.122 dB. This method decreased the insertion loss by a factor of 2.7 for an identical extinction ratio and improved the direct-writing efficiency by a factor of 9 for an equivalent FSR with multi-line scan. There was consistency between the experimental and simulation results. We also took measurements of the MZI’s temperature sensitivity. This work shows notable improvements in waveguide quality and ease of manufacture. This accomplishment lays the groundwork for further advancements in integrated mode-locked fiber laser technology. Full article
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73 pages, 4036 KB  
Review
Lattice Structures in Additive Manufacturing for Biomedical Applications: A Systematic Review
by Samuel Polo, Amabel García-Domínguez, Eva María Rubio and Juan Claver
Polymers 2025, 17(17), 2285; https://doi.org/10.3390/polym17172285 - 23 Aug 2025
Viewed by 1234
Abstract
The present study offers a systematic review of the current state of research on lattice structures manufactured by additive technologies for biomedical applications, with the aim of identifying common patterns, such as the use of triply periodic minimal surfaces (TPMS) for bone scaffolds, [...] Read more.
The present study offers a systematic review of the current state of research on lattice structures manufactured by additive technologies for biomedical applications, with the aim of identifying common patterns, such as the use of triply periodic minimal surfaces (TPMS) for bone scaffolds, as well as technological gaps and future research opportunities. Employing the PRISMA (Preferred Reporting Items for Systematic Reviews and Meta-Analyses) methodology, the review process ensures methodological rigor and replicability across the identification, screening, eligibility, and inclusion phases. Additionally, PRISMA was tailored by prioritizing technical databases and engineering-specific inclusion criteria, thereby aligning the methodology with the scope of this field. In recent years, a substantial surge in interdisciplinary research has underscored the promise of architected porous structures in enhancing mechanical compatibility, fostering osseointegration, and facilitating personalized medicine. A growing body of literature has emerged that explores the optimization of geometric features to replicate the behavior of biological tissues, particularly bone. Additive manufacturing (AM) has played a pivotal role in enabling the fabrication of complex geometries that are otherwise unachievable by conventional methods. The applications of lattice structures range from permanent load-bearing implants, commonly manufactured through selective laser melting (SLM), to temporary scaffolds for tissue regeneration, often produced with extrusion-based processes such as fused filament fabrication (FFF) or direct ink writing (DIW). Notwithstanding these advances, challenges persist in areas such as long-term in vivo validation, standardization of mechanical and biological testing, such as ISO standards for fatigue testing, and integration into clinical workflows. Full article
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19 pages, 3846 KB  
Article
Thermal Limitations in Ultrafast Laser Direct Writings in Dielectric Solids
by Bertrand Poumellec and Ruyue Que
Micromachines 2025, 16(9), 970; https://doi.org/10.3390/mi16090970 - 22 Aug 2025
Viewed by 998
Abstract
In the context of an ultrafast laser interacting with solids, temperature plays a special role in the transformation processes. Some of these processes can be thermally activated, while others can be either solely driven or constrained by temperature—such as refractive index change (fictive [...] Read more.
In the context of an ultrafast laser interacting with solids, temperature plays a special role in the transformation processes. Some of these processes can be thermally activated, while others can be either solely driven or constrained by temperature—such as refractive index change (fictive temperature), nanopore erasure, micro-bubble formation, and phase transition-like crystallization. The objective of this paper is to use a recently developed analytic approximation to understand the limitations imposed by the spatial temperature distribution and its evolution over the writing time, based on the key laser parameter combinations, and subsequently determine the boundary conditions of these parameters. Full article
(This article belongs to the Special Issue Ultrafast Laser Micro- and Nanoprocessing, 3rd Edition)
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14 pages, 6681 KB  
Article
An Efficient Manufacturing Method for Silicon Carbide Crystals in Polymers Based on a Multiscale Simulation-Driven Approach
by Jia Wang, Caiqin Jia, Heming Sun and Ye Tian
Micromachines 2025, 16(8), 946; https://doi.org/10.3390/mi16080946 - 18 Aug 2025
Viewed by 594
Abstract
The pyrolysis of polydimethylsiloxane (PDMS) for silicon carbide (SiC) fabrication endows precursor materials with exceptional microstructural controllability and complex geometry retention capability, rendering it widely applicable in flexible electronic packaging and microscale complex-structured heat exchangers. Nevertheless, the widespread adoption of pyrolytic SiC has [...] Read more.
The pyrolysis of polydimethylsiloxane (PDMS) for silicon carbide (SiC) fabrication endows precursor materials with exceptional microstructural controllability and complex geometry retention capability, rendering it widely applicable in flexible electronic packaging and microscale complex-structured heat exchangers. Nevertheless, the widespread adoption of pyrolytic SiC has been constrained by the low yield and process complexity inherent to conventional pyrolysis methods. In response, we developed a multiscale simulation framework integrating macroscopic thermal distribution with microscopic chemical reaction kinetics. The secondary pyrolysis protocol, designed based on simulation results, enhanced the SiC yield from <25% (conventional methods) to 79.2% while simultaneously improving crystalline quality. This simulation framework not only provides theoretical guidance for optimizing laser direct writing pyrolysis, but the proposed secondary ablation strategy also significantly expands the application potential of SiC-PDMS systems in device fabrication. Full article
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13 pages, 1888 KB  
Article
Femtosecond-Laser Direct Writing of Double-Line and Tubular Depressed-Cladding Waveguides in Ultra-Low-Expansion Glass
by Yuhao Wu, Sixuan Guo, Guanghua Cheng, Feiran Wang, Xu Wang and Yunjie Zhang
Photonics 2025, 12(8), 797; https://doi.org/10.3390/photonics12080797 - 8 Aug 2025
Viewed by 1582
Abstract
Addressing the stability requirements of photonic integrated devices operating over wide temperature ranges, this work achieves controlled fabrication of femtosecond-laser direct-written Type II double-line waveguides and Type III depressed-cladding tubular waveguides within ultra-low-expansion LAS glass-ceramics. The light-guiding mechanisms were elucidated through finite element [...] Read more.
Addressing the stability requirements of photonic integrated devices operating over wide temperature ranges, this work achieves controlled fabrication of femtosecond-laser direct-written Type II double-line waveguides and Type III depressed-cladding tubular waveguides within ultra-low-expansion LAS glass-ceramics. The light-guiding mechanisms were elucidated through finite element modeling. The influences of laser writing parameters and waveguide geometric structures on guiding performance were systematically investigated. Experimental results demonstrate that the double-line waveguides exhibit optimal single-mode guiding performance at 30 μm spacing and 120 mW writing power. For the tubular depressed-cladding waveguides, both single-mode and multi-mode fields are attainable across a broad processing parameter window. Large-mode-area characteristics manifested in the 50 μm core waveguide, exhibiting an edge-shifted intensity profile for higher-order modes that generated a hollow beam, enabling applications in atom guidance and particle trapping. Full article
(This article belongs to the Special Issue Direct Ultrafast Laser Writing in Photonics and Optoelectronics)
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12 pages, 5474 KB  
Article
Flexible Sensor with Material–Microstructure Synergistic Optimization for Wearable Physiological Monitoring
by Yaojia Mou, Cong Wang, Xiaohu Jiang, Jingxiang Wang, Changchao Zhang, Linpeng Liu and Ji’an Duan
Materials 2025, 18(15), 3707; https://doi.org/10.3390/ma18153707 - 7 Aug 2025
Viewed by 894
Abstract
Flexible sensors have emerged as essential components in next-generation technologies such as wearable electronics, smart healthcare, soft robotics, and human–machine interfaces, owing to their outstanding mechanical flexibility and multifunctional sensing capabilities. Despite significant advancements, challenges such as the trade-off between sensitivity and detection [...] Read more.
Flexible sensors have emerged as essential components in next-generation technologies such as wearable electronics, smart healthcare, soft robotics, and human–machine interfaces, owing to their outstanding mechanical flexibility and multifunctional sensing capabilities. Despite significant advancements, challenges such as the trade-off between sensitivity and detection range, and poor signal stability under cyclic deformation remain unresolved. To overcome the aforementioned limitations, this work introduces a high-performance soft sensor featuring a dual-layered electrode system, comprising silver nanoparticles (AgNPs) and a composite of multi-walled carbon nanotubes (MWCNTs) with carbon black (CB), coupled with a laser-engraved crack-gradient microstructure. This structural strategy facilitates progressive crack formation under applied strain, thereby achieving enhanced sensitivity (1.56 kPa−1), broad operational bandwidth (50–600 Hz), fine frequency resolution (0.5 Hz), and a rapid signal response. The synergistic structure also improves signal repeatability, durability, and noise immunity. The sensor demonstrates strong applicability in health monitoring, motion tracking, and intelligent interfaces, offering a promising pathway for reliable, multifunctional sensing in wearable health monitoring, motion tracking, and soft robotic systems. Full article
(This article belongs to the Special Issue Advanced Materials for Flexible Sensing Applications and Electronics)
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15 pages, 4886 KB  
Article
Fabrication of Diffractive Optical Elements to Generate Square Focal Spots via Direct Laser Lithography and Machine Learning
by Hieu Tran Doan Trung, Young-Sik Ghim and Hyug-Gyo Rhee
Photonics 2025, 12(8), 794; https://doi.org/10.3390/photonics12080794 - 6 Aug 2025
Viewed by 1400
Abstract
Recently, diffractive optics systems have garnered increasing attention due to their myriad benefits in various applications, such as creating vortex beams, Bessel beams, or optical traps, while refractive optics systems still exhibit some disadvantages related to materials, substrates, and intensity shapes. The manufacturing [...] Read more.
Recently, diffractive optics systems have garnered increasing attention due to their myriad benefits in various applications, such as creating vortex beams, Bessel beams, or optical traps, while refractive optics systems still exhibit some disadvantages related to materials, substrates, and intensity shapes. The manufacturing of diffractive optical elements has become easier due to the development of lithography techniques such as direct laser writing, photo lithography, and electron beam lithography. In this paper, we improve the results from previous research and propose a new methodology to design and fabricate advanced binary diffractive optical elements that achieve a square focal spot independently, reducing reliance on additional components. By integrating a binary square zone plate with an axicon zone plate of the same scale, we employ machine learning for laser path optimization and direct laser lithography for manufacturing. This streamlined approach enhances simplicity, accuracy, efficiency, and cost effectiveness. Our upgraded binary diffractive optical elements are ready for real-world applications, marking a significant improvement in optical capabilities. Full article
(This article belongs to the Section Lasers, Light Sources and Sensors)
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12 pages, 3213 KB  
Article
Improving Laser Direct Writing Overlay Precision Based on a Deep Learning Method
by Guohan Gao, Jiong Wang, Xin Liu, Junfeng Du, Jiang Bian and Hu Yang
Micromachines 2025, 16(8), 871; https://doi.org/10.3390/mi16080871 - 28 Jul 2025
Viewed by 507
Abstract
This study proposes a deep learning-based method to improve overlay alignment precision in laser direct writing systems. Alignment errors arise from multiple sources in nanoscale processes, including optical aberrations, mechanical drift, and fiducial mark imperfections. A significant portion of the residual alignment error [...] Read more.
This study proposes a deep learning-based method to improve overlay alignment precision in laser direct writing systems. Alignment errors arise from multiple sources in nanoscale processes, including optical aberrations, mechanical drift, and fiducial mark imperfections. A significant portion of the residual alignment error stems from the interpretation of mark coordinates by the vision system and algorithms. Here, we developed a convolutional neural network (CNN) model to predict the coordinates calculation error of 66,000 sets of computer-generated defective crosshair marks (simulating real fiducial mark imperfections). We compared 14 neural network architectures (8 CNN variants and 6 feedforward neural network (FNN) configurations) and found a well-performing, simple CNN structure achieving a mean squared error (MSE) of 0.0011 on the training sets and 0.0016 on the validation sets, demonstrating 90% error reduction compared to the FNN structure. Experimental results on test datasets showed the CNN’s capability to maintain prediction errors below 100 nm in both X/Y coordinates, significantly outperforming traditional FNN approaches. The proposed method’s success stems from the CNN’s inherent advantages in local feature extraction and translation invariance, combined with a simplified network architecture that prevents overfitting while maintaining computational efficiency. This breakthrough establishes a new paradigm for precision enhancement in micro–nano optical device fabrication. Full article
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13 pages, 8086 KB  
Article
Flexible FLIG-Based Temperature Sensor Enabled by Femtosecond Laser Direct Writing for Thermal Monitoring in Health Systems
by Huansheng Wu, Cong Wang, Linpeng Liu and Ji’an Duan
Sensors 2025, 25(15), 4643; https://doi.org/10.3390/s25154643 - 26 Jul 2025
Viewed by 770
Abstract
In this study, a facile and mask-free femtosecond laser direct writing (FLDW) approach is proposed to fabricate porous graphene (FLIG) patterns directly on polyimide (PI) substrates. By systematically adjusting the laser scanning spacing (10–25 μm), denser and more continuous microstructures are obtained, resulting [...] Read more.
In this study, a facile and mask-free femtosecond laser direct writing (FLDW) approach is proposed to fabricate porous graphene (FLIG) patterns directly on polyimide (PI) substrates. By systematically adjusting the laser scanning spacing (10–25 μm), denser and more continuous microstructures are obtained, resulting in significantly enhanced thermal sensitivity. The optimized sensor demonstrated a temperature coefficient of 0.698% °C−1 within the range of 40–120 °C, with response and recovery times of 10.3 s and 20.9 s, respectively. Furthermore, it exhibits remarkable signal stability across multiple thermal cycles, a testament to its reliability in extreme conditions. Moreover, the sensor was successfully integrated into a 3D-printed robotic platform, achieving both contact and non-contact temperature detection. These results underscore the sensor’s practical adaptability for real-time thermal sensing. This work presents a viable and scalable methodology for fabricating high-performance FLIG-based flexible temperature sensors, with extensive application prospects in wearable electronics, electronic skin, and intelligent human–machine interfaces. Full article
(This article belongs to the Special Issue State of the Art in Wearable Sensors for Health Monitoring)
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8 pages, 10733 KB  
Article
Integrated NV Center-Based Temperature Sensor for Internal Thermal Monitoring in Optical Waveguides
by Yifan Zhao, Shihan Ding, Shuo Wang, Yiming Hu, Hongliang Liu, Zhen Shang and Yongjian Gu
Sensors 2025, 25(13), 4123; https://doi.org/10.3390/s25134123 - 2 Jul 2025
Viewed by 932
Abstract
Color centers in solids, such as nitrogen-vacancy (NV) centers in diamonds, have gained significant attention in recent years due to their exceptional properties for quantum sensing. In this work, we demonstrate an NV center-based temperature sensor integrated into an optical waveguide to enable [...] Read more.
Color centers in solids, such as nitrogen-vacancy (NV) centers in diamonds, have gained significant attention in recent years due to their exceptional properties for quantum sensing. In this work, we demonstrate an NV center-based temperature sensor integrated into an optical waveguide to enable internal temperature sensing. A surface-cladding optical waveguide was fabricated in a diamond wafer containing NV centers using femtosecond laser direct writing. By analyzing the resonant peaks of optically detected magnetic resonance (ODMR) spectra, we established a precise correlation between temperature changes induced by the pump laser and shifts in the ODMR peak positions. This approach enabled temperature monitoring with a sensitivity of 1.1 mK/Hz. These results highlight the significant potential of color centers in solids for non-contact, micro-scale temperature monitoring. Full article
(This article belongs to the Section Optical Sensors)
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