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Actuators
Special Issues
Micro/Nano Electromechanical Sensors and Actuators
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Micro/Nano Electromechanical Sensors and Actuators

A special issue of Actuators (ISSN 2076-0825). This special issue belongs to the section "Miniaturized and Micro Actuators".

Deadline for manuscript submissions: closed (30 November 2023) | Viewed by 5729

Special Issue Editors

Prof. Dr. Norihisa Miki

E-Mail Website
Guest Editor
Department of Mechanical Engineering, Keio University, Kanagawa 223-8522, Japan
Interests: micro/nano engineering and science; human interface; interaction/cognitive science/media art; medical engineering; artificial organ; machine learning; artificial intelligence (AI); MEMS (microelectromechanical systems)
Special Issues, Collections and Topics in MDPI journals
Dr. Jian LU

E-Mail Website
Guest Editor
Device Technology Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Namiki 1-2-1, Tsukuba, Ibaraki, Japan
Interests: MEMS/NEMS; sensors; piezoelectric film; FEM simulations; wireless sensor networks; system integration; micro processes
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

We are planning a Special Issue that will include high-quality papers presented during the 13th Japan–China–Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2022, https://www.jckmemsnems2022.com/), sponsored by the MDPI open access journal Actuators.

The JCK MEMS/NEMS Conference is organized to provide an annual East Asian forum for presenting recent progress in Green & Life Innovation based on MEMS/NEMS technology, with special emphasis placed on international collaboration toward solving environmental and social issues among East Asian economies. In this Special Issue, selected papers from JCK MEMS/NEMS 2022 will be published with the aim of highlighting the latest achievements in the research on micro-/nanosensors, actuators, and related technologies. Both original research papers (extended from conference proceedings) and review papers that focus on the state-of-the-art in one of the following topics and covered by the journal’s aims and scope will be considered for publication.

  • Micro/nano fabrication, including 3D printing
  • Micro/nano electronics, including flexible electronics
  • Micro/nano sensors and actuators
  • Micro/nano systems
  • Networked microsystems and IoT technologies
  • Materials and device characterization
  • Integration and packaging technologies
  • Modeling and simulation of manufacturing process
  • Other relevant topics that are covered by the journal’s aims and scope

You may choose our Joint Special Issue in Sensors.

Prof. Dr. Norihisa Miki
Dr. Jian Lu
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Actuators is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • microelectromechanical system
  • nanoelectromechanical system
  • actuators
  • sensors
  • fabrication
  • IoT
  • Green & Life Innovation

Published Papers (2 papers)

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Research

12 pages, 7099 KiB  
Article
Spiral Spring-Supported Force Plate with an External Eddy Current Displacement Sensor
by Yuta Kawasaki and Hidetoshi Takahashi
Actuators 2023, 12(1), 16; https://doi.org/10.3390/act12010016 - 31 Dec 2022
Cited by 4 | Viewed by 2058
Abstract
This study proposes a force plate with a planar spring and an eddy current displacement sensor to measure the ground reaction force (GRF) of a small insect and reveal its motion characteristics. The proposed force plate comprises a circular aluminum plate, four aluminum [...] Read more.
This study proposes a force plate with a planar spring and an eddy current displacement sensor to measure the ground reaction force (GRF) of a small insect and reveal its motion characteristics. The proposed force plate comprises a circular aluminum plate, four aluminum springs symmetrically connected to the plate, and an eddy current displacement sensor under the plate. The diameter and thickness of the fabricated plate were 8 and 0.1 mm, respectively. The spring width was 0.4 mm. When a force is applied to the plate, the plate moves vertically downward. Then, an eddy current displacement sensor detects the plate displacement without contact. The applied force can be measured using Hooke’s law. The proposed force plate has the advantages of ease of fabrication and cost-effectiveness. The central displacement variation and resonant frequency of the designed springs were evaluated by simulation. Then, we calibrated the fabricated force plate to obtain the sensitivity variation and resonant frequency. The experimental results suggest that the proposed force plate can effectively measure the GRF of a small insect. Full article
(This article belongs to the Special Issue Micro/Nano Electromechanical Sensors and Actuators)
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12 pages, 8623 KiB  
Article
Resonant Adaptive MEMS Mirror
by Amr Kamel, Samed Kocer, Lyazzat Mukhangaliyeva, Resul Saritas, Ahmet Gulsaran, Alaa Elhady, Mohamed Basha, Parsin Hajireza, Mustafa Yavuz and Eihab Abdel-Rahman
Actuators 2022, 11(8), 224; https://doi.org/10.3390/act11080224 - 05 Aug 2022
Cited by 3 | Viewed by 2724
Abstract
A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural springs. Unlike traditional bias [...] Read more.
A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural springs. Unlike traditional bias actuated DMs, it uses resonant electrostatic actuation (REA) to realize low- and high-order Zernike modes with a single drive signal. Instead of the hundreds or thousands of electrodes deployed by traditional DMs, the proposed DM employs only 49 electrodes and eliminates the need for spatial control algorithms and associated hardware, thereby providing a compact low-cost alternative. It also exploits dynamic amplification to reduce power requirements and increase the stroke by driving the DM at resonance. The DM was fabricated using a commercial silicon-on-insulator (SOI) MEMS process. Experimental modal analysis was carried out using laser Doppler vibrometry (LDV) to identify mode shapes of the DM and their natural frequencies. We are able to observe all of the lowest eight Zernike modes. Full article
(This article belongs to the Special Issue Micro/Nano Electromechanical Sensors and Actuators)
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