MEMS Ultrasonic Transducers and Their Applications
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".
Deadline for manuscript submissions: closed (31 May 2024) | Viewed by 1943
Special Issue Editors
Interests: MEMS sensors; CMUTs; PMUTs; flexible electronics & wearable sensors
Special Issues, Collections and Topics in MDPI journals
Interests: micro-nano fabrication technology and intelligent sensors; micromachined ultrasonic transducers; quantum sensors
Special Issues, Collections and Topics in MDPI journals
Interests: MEMS sensors and actuators; micromachined ultrasonic transducers; resonators
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
In comparison with their conventional bulk PZT-based counterparts, ultrasonic transducers based on MEMS technologies boast advantages including miniaturized volume, broadened bandwidth, low power consumption, ease of two dimension (2D) array fabrication, and facile integration with ICs. These advantages make them promising candidates in 3D ultrasonic medical imaging, portable/handle ultrasonic diagnostic device, and long-term and in situ nondestructive detection. In the past decades, a great number of studies have focused on the design, modeling, and fabrication of MEMS ultrasonic transducers, including capacitive micromachined ultrasonic transducers (CMUTs) and piezoelectric micromachined ultrasonic transducers (PMUTs). Remarkable progress has been achieved in improving their performance, in areas such as electromechanical coupling efficiency and transmitting and receiving resistivity. Real-time 3D ultrasonic imaging has been demonstrated, and commercially available handheld imaging devices (such as ultrasound-on-chip probes by Butterfly Network, Inc.) have been developed for portable medical diagnostics applications. However, with the increasing requirements and extending scope of practical applications, new challenges are rising and continuous effort is needed. For instance, air-coupled MEMS ultrasonic transducers are in high demand in air-coupled sensing situations, such as biometric recognition, range finding, and 3D gesture recognition, which have widespread applications in the emerging fields of human–machine interfaces, intelligent robotics, and non-contact controlled electronics. MEMS ultrasonic transducers with high output acoustic pressure and low power consumption are required in order to overcome the exponential decay of acoustic energy in air environments and enhance the propagation distance and transducer response. Beyond sensing ultrasound, power ultrasound is ushering in a new era because of its significant applications in ultrasonic therapy. Benefiting from its low power consumption, portability, and noninvasiveness, MEMS transducer-based ultrasonic therapy has become a widely accepted and easily accessible approach for various treatments for critical illness, such as kidney stone comminution, cancer hyperthermia therapies, transcranial sonothrombolysis for brain stroke treatments, and ultrasound neuroregulation for Alzheimer's disease and Parkinson's disease. In these applications, MEMS transducers with high output power are required in order to provide enough ultrasound energy to interact with human tissues or organs. To solve these newly raised and unmet requirements in the aforementioned applications, a vast number of investigations should be carried out to innovate the modeling, design, fabrication, and packaging technologies of MEMS ultrasonic transducers.
Therefore, this Special Issue focuses on recent advance in modeling, design, fabrication, packaging, and applications of MEMS ultrasonic transducers. Both original research and review papers are welcome.
Dr. Zhikang Li
Prof. Dr. Libo Zhao
Prof. Dr. Jin Xie
Guest Editors
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
Keywords
- CMUTs
- PMUTs
-
Principle innovation
- Structure design
- Theoretical modeling
- Fabrication
- Packaging
- Front-end circuits
- Performance enhancement
- Emerging applications
Benefits of Publishing in a Special Issue
- Ease of navigation: Grouping papers by topic helps scholars navigate broad scope journals more efficiently.
- Greater discoverability: Special Issues support the reach and impact of scientific research. Articles in Special Issues are more discoverable and cited more frequently.
- Expansion of research network: Special Issues facilitate connections among authors, fostering scientific collaborations.
- External promotion: Articles in Special Issues are often promoted through the journal's social media, increasing their visibility.
- e-Book format: Special Issues with more than 10 articles can be published as dedicated e-books, ensuring wide and rapid dissemination.
Further information on MDPI's Special Issue polices can be found here.