The multilayered Mo
2N/Ag-SiN
x self-lubricant films were designed and deposited using a DC (Direct Current) magnetron sputtering system under mixed gas atmosphere of N
2 and Ar. The modulation ratio (thickness ratio of Mo
2N to Ag-SiN
x) was fixed at 2:1, while the modulation periods (thickness of Mo
2N and its adjacent Ag-SiN
x layer) were set at 20, 40, and 60 nm. The results indicated that all multilayer films, regardless of modulation period, exhibited a combination of face-centered cubic (fcc) and amorphous phases. Specifically, fcc-Mo
2N was detected in the Mo
2N layers, while fcc-Ag and amorphous SiN
x co-existed in the Ag-SiN
x layers. The multilayered architecture induced residual stress and interface strengthening, resulting in hardness values exceeding 21 GPa for all films. Compared to Mo
2N and Ag-SiN
x monolayer films, the multilayer structure significantly enhanced tribological properties at room temperature, particularly in terms of wear resistance. The Mo
2N/Ag-SiN
x multilayer films exhibit ~25% lower friction than Ag-SiN
x, ~3% lower than Mo
2N, and achieve remarkable wear rate reductions of ~71% and ~85% compared to Ag-SiN
x and Mo
2N, respectively, demonstrating superior tribological performance. The synergistic effects of both modulation layers and relative high hardness were key factors contributing to the enhanced tribological behavior.
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