Laser Micro/Nano Fabrication, Second Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".

Deadline for manuscript submissions: 28 February 2025 | Viewed by 6939

Special Issue Editor


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Guest Editor
Department of Physics and Optical Science, University of North Carolina at Charlotte, Charlotte, NC 28223, USA
Interests: high-energy lasers; HEL; laser-induced damage threshold; LIDT; laser therapeutics; opto-mechanical design; reactive ion etching
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Special Issue Information

Dear Colleagues,

I invite you to contribute to this Special Issue, which seeks research and review articles on laser micro/nanofabrication techniques. These include but are not limited to (1) new laser-based approaches to fabricate micro/nanostructures, (2) subtractive methods, precision laser ablation and cutting, (3) additive methods and laser-induced deposition, (4) laser bonding, welding, and the formation of components; (5) novel software, CAD, and nanometer precision hardware for direct laser writing, and (6) potential research and industrial applications in optical, electronic, and biological fields. Laser micro/nanofabrication is rapidly becoming a preferred manufacturing method due to its inherent high precision, mask-less nature, and rapid processing speed. This Special Issue aims to feature the latest developments in various applications of laser micromachining.

Dr. Thomas C. Hutchens
Guest Editor

Manuscript Submission Information

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Keywords

  • laser micro/nanofabrication/machining
  • direct laser writing
  • subtractive/additive processing
  • surface texturing
  • optical surface modification
  • ultrafast/femtosecond lasers

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Related Special Issue

Published Papers (5 papers)

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Research

15 pages, 3702 KiB  
Article
Impact of Conventional and Laser-Assisted Machining on the Microstructure and Mechanical Properties of Ti-Nb-Cr-V-Ni High-Entropy Alloy Fabricated with Directed Energy Deposition
by Ho-In Jeong, Osama Salem, Dong-Won Jung, Choon-Man Lee and Jeung-Hoon Lee
Micromachines 2024, 15(12), 1457; https://doi.org/10.3390/mi15121457 - 29 Nov 2024
Viewed by 512
Abstract
The high-entropy alloy (HEA) has recently attracted significant interest due to its novel alloy design concept and exceptional mechanical properties, which may exhibit either a single or multi-phase structure. Specifically, refractory high-entropy alloys (RHEA) composed of titanium, niobium, and nickel-based HEA demonstrate remarkable [...] Read more.
The high-entropy alloy (HEA) has recently attracted significant interest due to its novel alloy design concept and exceptional mechanical properties, which may exhibit either a single or multi-phase structure. Specifically, refractory high-entropy alloys (RHEA) composed of titanium, niobium, and nickel-based HEA demonstrate remarkable mechanical properties at elevated temperatures. Additive manufacturing (AM), specifically Direct Energy Deposition (DED), is efficient in fabricating high-entropy alloys (HEA) owing to its fast-cooling rates, which promote uniform microstructures and reduce defects. This study involved the fabrication of the Ti33Nb28Cr11V11Ni17 (Ti-Nb-Cr-V-Ni) RHEA utilizing DED. Additionally, the post-processing of the fabricated alloy is conducted using conventional machining (CM) and laser-assisted machining (LAM). The results indicate thermal conductivity and specific heat increased, whereas tensile strength reduced with rising temperature. Significant softening was observed above 800 °C, resulting in a considerable decrease in tensile strength. Furthermore, the LAM caused material softening and reduced the cutting force by 60.0% relative to CM. Furthermore, the chemical composition of Ti-Nb-Cr-V-Ni remained unaffected even after post-processing with CM and LAM. The research indicates that post-processing with LAM is essential for developing resilient RHEA for practical use. Full article
(This article belongs to the Special Issue Laser Micro/Nano Fabrication, Second Edition)
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16 pages, 21597 KiB  
Article
Reducing Feature Size in Laser Implantation Texturing
by Bart Ettema, Dave Matthews and Gert-Willem Römer
Micromachines 2024, 15(8), 958; https://doi.org/10.3390/mi15080958 - 27 Jul 2024
Viewed by 579
Abstract
Embossing rolls are used in a variety of sectors to transfer surface textures to a product. Textures on the rolls are typically achieved by material-removal techniques, resulting in craters in the surface of the roll. The wear resistance of the surfaces is improved [...] Read more.
Embossing rolls are used in a variety of sectors to transfer surface textures to a product. Textures on the rolls are typically achieved by material-removal techniques, resulting in craters in the surface of the roll. The wear resistance of the surfaces is improved by additional coating technologies. A novel process offering improved surface design freedom and which negates the need for post-coating techniques is the embedding of micro-meter-sized ceramic particles in the surface of the roll. This can be achieved through micro-additive processing. This work presents and discusses experimental results of surface texturing through locally derived laser-induced melt pools in which ceramic particles are dissolved. This process is termed laser implantation, or laser dispersing. Using this technology, dome-shaped surface structures with significantly increased hardness compared to the bare steel can be achieved. Reported results in the literature focus on implantations with diameters ranging from 150 μm to 400 μm and heights ranging from 10 μm to 30 μm. However, features with smaller diameters and heights are desired for technology adoption to permit a wider range of surface roughness. This paper presents and discusses the experimental results of implantations with a diameter smaller than 150 µm, with heights between 1 μm and 15 μm. For that purpose, a Nd:YAG laser source (focal diameter 70 μm, pulse durations from 3 to 15 ms, pulse power from 20 to 50 W average) was used to induce a melt pool driving the particle embedding. Full article
(This article belongs to the Special Issue Laser Micro/Nano Fabrication, Second Edition)
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13 pages, 5714 KiB  
Article
Femtosecond Laser Percussion Drilling of Silicon Using Repetitive Single Pulse, MHz-, and GHz-Burst Regimes
by Pierre Balage, Manon Lafargue, Théo Guilberteau, Guillaume Bonamis, Clemens Hönninger, John Lopez and Inka Manek-Hönninger
Micromachines 2024, 15(5), 632; https://doi.org/10.3390/mi15050632 - 9 May 2024
Cited by 1 | Viewed by 2706
Abstract
In this contribution, we present novel results on top-down drilling in silicon, the most important semiconductor material, focusing specifically on the influence of the laser parameters. We compare the holes obtained with repetitive single pulses, as well as in different MHz- and GHz-burst [...] Read more.
In this contribution, we present novel results on top-down drilling in silicon, the most important semiconductor material, focusing specifically on the influence of the laser parameters. We compare the holes obtained with repetitive single pulses, as well as in different MHz- and GHz-burst regimes. The deepest holes were obtained in GHz-burst mode, where we achieved holes of almost 1 mm depth and 35 µm diameter, which corresponds to an aspect ratio of 27, which is higher than the ones reported so far in the literature, to the best of our knowledge. In addition, we study the influence of the energy repartition within the burst in GHz-burst mode. Full article
(This article belongs to the Special Issue Laser Micro/Nano Fabrication, Second Edition)
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13 pages, 11058 KiB  
Article
Improving the Quality of Laser Drilling by Assisted Process Methods of Static Solution and Mist Blowing
by Yuan Tao, Zhiwei Wang, Shanshan Hu, Yufei Feng, Fan Yang and Guangliang Li
Micromachines 2024, 15(4), 515; https://doi.org/10.3390/mi15040515 - 12 Apr 2024
Viewed by 1309
Abstract
The use of static solution-assisted laser drilling can effectively improve hole roundness, decrease taper angle, and reduce recast layer thickness and hole wall slag adhesion. However, the enormous energy of the laser will evaporate the solution to form a suspension droplet and reduce [...] Read more.
The use of static solution-assisted laser drilling can effectively improve hole roundness, decrease taper angle, and reduce recast layer thickness and hole wall slag adhesion. However, the enormous energy of the laser will evaporate the solution to form a suspension droplet and reduce the quality and efficiency of laser drilling. To deal with this defect, the mist-blowing method was used to reduce the influence of droplets on the taper angle and recast layer. In this work, the effect of wind speed on drilling quality was examined, and laser drilling in air, water, and NaCl solution was carried out to analyse the effect of solution composition on hole wall morphology. The results showed that a speed fan with a proper wind speed that disperses the droplets formed in the processing area can significantly reduce the refraction and scattering of the laser, and the taper angle and roundness of the drilling hole were also reduced by 15.6% and improved by 2.4%, respectively, under the wind speed of 2 m/s. The hole wall morphology showed a thicker recast layer and cracking in air, while it was thinner in water and there was little or no layer in the NaCl solution in the same current. When drilling in NaCl, the taper angle and roundness of the drilling hole were reduced by 4.13% and improved by 2.11%, respectively, compared to water. Due to the mechanical effect of the laser in the NaCl solution, the impact force on the material was much greater than that in water. The solution cavitation effect, generated by the absorption of laser energy, caused an explosive impact on the molten material adhered to the surface of the hole wall. Above all, drilling in the NaCl solution with a current of 200 A and a wind speed of 2 m/s was the optimal condition for obtaining the best processing quality. Full article
(This article belongs to the Special Issue Laser Micro/Nano Fabrication, Second Edition)
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12 pages, 2651 KiB  
Article
Fabrication of Thin-Wall Structures with a Femtosecond Laser and Stainless Steel Powder
by Iñigo Ramon-Conde, Luis Omeñaca, Mikel Gomez-Aranzadi, Enrique Castaño, Ainara Rodriguez and Santiago M. Olaizola
Micromachines 2024, 15(4), 444; https://doi.org/10.3390/mi15040444 - 26 Mar 2024
Viewed by 1047
Abstract
Additive Manufacturing (AM) has revolutionized the production of complex three-dimensional (3D) structures; however, the efficient and precise fabrication of thin profiles remains a challenge. This study explores the application of femtosecond-laser-based additive manufacturing techniques for the production of thin profiles with micron-scale features, [...] Read more.
Additive Manufacturing (AM) has revolutionized the production of complex three-dimensional (3D) structures; however, the efficient and precise fabrication of thin profiles remains a challenge. This study explores the application of femtosecond-laser-based additive manufacturing techniques for the production of thin profiles with micron-scale features, reaching profile thicknesses below 100 µm. The study investigates the effects of scanning strategy, with optimized processing parameters, on the fabrication of thin profiles; wall thickness measurements were carried out using various technologies to analyse the influence of each on the resulting values. The quality of the walls was quantified by means of a visual characterization of the melted volumes, analysing the evolution of the measured thickness with regard to the processing conditions and in relation to the theoretical thicknesses of the walls. Full article
(This article belongs to the Special Issue Laser Micro/Nano Fabrication, Second Edition)
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