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Advances in Ultra-Precision Machining Technology and Applications, Volume II

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A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D：Materials and Processing".

Deadline for manuscript submissions: closed (30 November 2023) | Viewed by 15366

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Prof. Dr. Benny C. F. Cheung

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Guest Editor

State Key Laboratory of Ultra-Precision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Kowloon, Hong Kong, China
Interests: precision engineering; ultra-precision machining technology; precision metrology
Special Issues, Collections and Topics in MDPI journals

Dr. Chenyang Zhao

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Guest Editor

School of Mechanical Engineering and Automation, Harbin Institute of Technology (Shenzhen), Shenzhen 518055, China
Interests: precision measurement; ultra-precision machining

Special Issue Information

Dear Colleagues,

Ultra-precision machining technology has been widely used in the manufacture of many mission-critical components for various industrial areas, such as advanced optics, photonics aerospace, automotive, telecommunications, biomedical, energy and environmental, etc. Today, ultra-precision machining technology is capable of machining workpieces with sub-micrometer form accuracy and nanometric surface roughness with a high degree of geometrical complexity. Due to the increasing degree of geometrical complexity, high-precision requirements and the evolution of advanced materials of the workpiece being machined lead to numerous research challenges in different fields, including ultra-precision machining technologies, novel machining processes, cutting mechanics, surface generation mechanisms, novel machine design, advanced sensing, machine metrology, accurate control of the machining process through modeling and simulation of ultra-precision machining processes, error compensation, materials sciences, measurement and on-machine metrology, as well as advanced applications for functional uses. This Special Issue aims to provide a collection of the latest research results and findings in recent advances in ultra-precision machining technology and applications.

Prof. Dr. Benny C. F. Cheung
Dr. Chenyang Zhao
Guest Editors

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Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

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Keywords

ultra-precision machining
machine design
precision manufacturing
cutting mechanics
surface generation mechanisms
measurement
surface characterization
advanced materials
precision metrology
modeling and simulation
advanced sensing
error compensation
novel machining processes

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Advances in Ultra-Precision Machining Technology and Applications in Micromachines (18 articles)

Published Papers (14 papers)

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17 pages, 9240 KiB

Open AccessArticle

Fabrication and Polishing Performance of Diamond Self-Sharpening Gel Polishing Disk

by Lanxing Xu, Kaiping Feng, Liang Zhao and Binghai Lyu

Micromachines 2024, 15(1), 56; https://doi.org/10.3390/mi15010056 - 27 Dec 2023

Viewed by 880

Abstract

A diamond gel polishing disk with self-sharpening ability is proposed to solve the problem of glazing phenomenon in the gel polishing disks. Aluminum nitride (AlN) powder with silica sol film coating (A/S powder) is added to the polishing disk, and a specific solution is used to dissolve the A/S powder during polishing, forming a pore structure on the polishing disk. To realize the self-sharpening process, the dissolution property of the A/S powder is analyzed. The effect of A/S powder content on the friction and wear performance and the polishing performance of 4H-SiC wafers are investigated. Results showed that the friction coefficient of the polishing disk with 9 wt% A/S powder content is the most stable. The surface roughness R_a of 2.25 nm can be achieved, and there is no obvious glazing phenomenon on the polishing disk after polishing. The surface roughness of the 4H-SiC wafer is reduced by 38.8% compared with that of the polishing disk with no A/S powder addition after rough polishing, and the 4H-SiC wafer then obtained a damage-free surface with a R_a less than 0.4 nm after fine polishing by chemical mechanical polishing (CMP). Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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17 pages, 3832 KiB

Open AccessArticle

Experimental Investigations of Using Aluminum Oxide (Al₂O₃) and Nano-Graphene Powder in the Electrical Discharge Machining of Titanium Alloy

by Rakesh Chaudhari, Sakshum Khanna, Vivek K. Patel, Jay Vora, Soraya Plaza and Luis Norberto López de Lacalle

Micromachines 2023, 14(12), 2247; https://doi.org/10.3390/mi14122247 - 16 Dec 2023

Cited by 1 | Viewed by 990

Abstract

In the present study, a comprehensive parametric analysis was carried out using the electrical discharge machining of Ti6Al4V, using pulse-on time, current, and pulse-off time as input factors with output measures of surface roughness and material removal rate. The present study also used two different nanopowders, namely alumina and nano-graphene, to analyze their effect on output measures and surface defects. All the experimental runs were performed using Taguchi’s array at three levels. Analysis of variance was employed to study the statistical significance. Empirical relations were generated through Minitab. The regression model term was observed to be significant for both the output responses, which suggested that the generated regressions were adequate. Among the input factors, pulse-off time and current were found to have a vital role in the change in material removal rate, while pulse-on time was observed as a vital input parameter. For surface quality, pulse-on time and pulse-off time were recognized to be influential parameters, while current was observed to be an insignificant factor. Teaching–learning-based optimization was used for the optimization of output responses. The influence of alumina and nano-graphene powder was investigated at optimal process parameters. The machining performance was significantly improved by using both powder-mixed electrical discharge machining as compared to the conventional method. Due to the higher conductivity of nano-graphene powder, it showed a larger improvement as compared to alumina powder. Lastly, scanning electron microscopy was operated to investigate the impact of alumina and graphene powder on surface morphology. The machined surface obtained for the conventional process depicted more surface defects than the powder-mixed process, which is key in aeronautical applications. Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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15 pages, 6577 KiB

Open AccessArticle

Tool Wear State Recognition Based on One-Dimensional Convolutional Channel Attention

by Zhongling Xue, Liang Li, Ni Chen, Wentao Wu, Yuhang Zou and Nan Yu

Micromachines 2023, 14(11), 1983; https://doi.org/10.3390/mi14111983 - 26 Oct 2023

Cited by 2 | Viewed by 767

Abstract

Tool wear state recognition is an important part of tool condition monitoring (TCM). Online tool wear monitoring can avoid wasteful early tool changes and degraded workpiece quality due to later tool changes. This study incorporated an attention mechanism implemented by one-dimensional convolution in a convolutional neural network for improving the performance of the tool wear recognition model (1DCCA-CNN). The raw multichannel cutting signals were first preprocessed and three time-domain features were extracted to form a new time-domain sequence. CNN was used for deep feature extraction of temporal sequences. A novel 1DCNN-based channel attention mechanism was proposed to weigh the channel dimensions of deep features to enhance important feature channels and capture key features. Compared with the traditional squeeze excitation attention mechanism, 1DCNN can enhance the information interaction between channels. The performance of the model was validated on the PHM2010 public cutting dataset. The excellent performance of the proposed 1DCCA-CNN was verified by the improvement of 4% and 5% compared to the highest level of existing research results on T1 and T3 datasets, respectively. Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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21 pages, 4231 KiB

Open AccessArticle

Simulation and Experimental Study on the Precision Molding of Irregular Vehicle Glass Components

by Zhijun Chen, Shunchang Hu, Shengfei Zhang, Qingdong Zhang, Zhen Zhang and Wuyi Ming

Micromachines 2023, 14(10), 1974; https://doi.org/10.3390/mi14101974 - 23 Oct 2023

Cited by 1 | Viewed by 914

Abstract

The high level of stress and dimension deviation induced by glass molding are the main causes of the low yield rate of large, irregular glass components on vehicles. To solve this issue, a numerical model of large glass component molding was established in this study, which aimed to analyze the dominant factors of molding quality and achieve a synergistic balance between quality characteristics and energy consumption. The results show that molding temperature is the dominant factor affecting the energy consumption and residual stress, and the molding pressure is the main factor affecting the dimension deviation. Furthermore, the NSGA-II optimization algorithm was used to optimize the maximum residual stress, dimension deviation, and energy consumption with the numerical results. The combination of a heating rate of 1.95 °C/s, holding time of 158 s, molding temperature of 570 °C, molding pressure of 34 MPa, and cooling rate of 1.15 °C/s was determined to be the optimized scheme. The predictive error of the numerical result, based on the optimized scheme, was experimentally verified to be less than 20%. It proved the accuracy of the model in this study. These results can provide guidance for the subsequent precision molding of large, irregular glass components. Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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25 pages, 25110 KiB

Open AccessArticle

Design and Analysis of Ultra-Precision Smart Cutting Tool for In-Process Force Measurement and Tool Nanopositioning in Ultra-High-Precision Single-Point Diamond Turning

by Shahrokh Hatefi and Farouk Smith

Micromachines 2023, 14(10), 1857; https://doi.org/10.3390/mi14101857 - 28 Sep 2023

Viewed by 993

Abstract

Ultra-high-precision single-point diamond turning (SPDT) is the state-of-the-art machining technology for the advanced manufacturing of critical components with an optical surface finish and surface roughness down to one nanometer. One of the critical factors that directly affects the quality of the diamond-cutting process is the cutting force. Increasing the cutting force can induce tool wear, increase the cutting temperature, and amplify the positioning errors of the diamond tool caused by the applied cutting force. It is important to measure the cutting force during the SPDT process to monitor the tool wear and surface defects in real time. By measuring the cutting force in different cutting conditions, the optimum cutting parameters can be determined and the best surface accuracies with minimum surface roughness can be achieved. In this study a smart cutting tool for in-process force measurement and nanopositioning of the cutting tool for compensating the displacements of the diamond tool during the cutting process is designed and analyzed. The proposed smart cutting tool can measure applied forces to the diamond tool and correct the nanometric positioning displacements of the diamond tool in three dimensions. The proposed cutting tool is wireless and can be used in hybrid and intelligent SPDT platforms to achieve the best results in terms of optical surface finish. The simulation results are shown to be almost consistent with the results of the derived analytical model. The preliminary results pave the way for promising applications of the proposed smart cutting tool in SPDT applications in the future. Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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40 pages, 38086 KiB

Open AccessArticle

A Novel Approach for Dry Cutting Inconel 718 in a More Sustainable and Low-Cost Way by Actively and Purposely Utilizing the Built-Up Layer

by Xiaoqi Song, Weiming He and Tohru Ihara

Micromachines 2023, 14(9), 1787; https://doi.org/10.3390/mi14091787 - 19 Sep 2023

Viewed by 861

Abstract

Due to its physical and mechanical properties, Inconel 718 remains a difficult-to-cut material and there is an urgent need to develop a more sustainable and low-cost way to machine it. A novel approach for dry cutting Inconel 718 by actively and purposely utilizing the built-up layer (BUL), which can be called the self-protective tool (SPT) method, is proposed and investigated in detail in this paper. Various cutting experiments were carried out using the age-treated Inconel 718 and uncoated cemented carbide tools. The formation condition of the BUL, its formation mechanism, its stability, and its protective effect were examined by measuring the tools after cutting using a scanning electron microscope (SEM) and laser confocal microscopy (LCM). The influences of BUL on the cutting process were investigated using cutting force analysis and surface roughness analysis. The results confirmed that the stability of the BUL is very high, and the BUL can not only significantly protect the tool from wear but also reduce friction at the tool–chip interface and maintain surface roughness. It also revealed that the height of the BUL can play a very important role in its protective effect. Comparative experiments verified the effectiveness and generalizability of the proposed SPT method. Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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14 pages, 4786 KiB

Open AccessArticle

Optimization Milling Force and Surface Roughness of Ti-6Al-4V Based on Ultrasonic-Assisted Milling (UAM): An Experimental Study

by Qingqing Lü, Saiyu Yang, Liquan Yang, Erbo Liu, Guangxi Li and Daohui Xiang

Micromachines 2023, 14(9), 1699; https://doi.org/10.3390/mi14091699 - 30 Aug 2023

Viewed by 730

Abstract

This study aimed to develop a longitudinal ultrasonic-assisted milling system to investigate the machinability of titanium (Ti) Alloy Ti-6Al-4V (TC4). Aiming at reduced milling force and enhanced surface quality, ultrasonic-assisted milling was investigated taking into account the following processing parameters: spindle speed (cutting rate) n, feed per tooth f_z, milling depth a_p, and ultrasonic amplitude A. A comparison was made with conventional milling. The results of univariate tests demonstrated that the ultrasonic amplitude had the most significant impact on the milling force along the z-axis, resulting in a reduction of 15.48% compared with conventional milling. The range analysis results of multivariate tests demonstrated that a_p and f_z were the dominant factors influencing the cutting force. The minimum reduction in the milling force in ultrasonic-assisted milling along the x-, y-, and z-axes was 11.77%, 15.52%, and 17.66%, respectively, compared with that in conventional milling. The ultrasonic-assisted milling led to reduced surface roughness and enhanced surface quality; the maximum surface roughness in ultrasonic-assisted milling was 25.93%, 36.36% and 26.32% in terms of n, f_z, and a_p, respectively. In longitudinal ultrasonic-assisted milling, the periodic “separation-contact” was accompanied by microimpacts, resulting in even smaller intermittent periodic cutting forces. Hence, regular fish scale machining mesh was observed on the processed surface, and the workpiece surface exhibited high cleanness and smoothness. The reasonable configuration of ultrasonic-assisted milling parameters can effectively improve the milling force and surface quality of Ti alloys and accumulate reference data for the subsequent machining process research. Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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11 pages, 9118 KiB

Open AccessArticle

Splicing Measurement and Compensation of Straightness Errors for Ultra-Precision Guideways

by Lian Zhou, Nan Zheng, Jie Li, Zhigang Yuan, Jian Wang, Fei Fang and Qiao Xu

Micromachines 2023, 14(9), 1670; https://doi.org/10.3390/mi14091670 - 26 Aug 2023

Cited by 1 | Viewed by 992

Abstract

The straightness error of guideways is one of the key indicators of an ultra-precision machine, which plays an important role in the machining accuracy of a workpiece. In order to measure the straightness error of a long-distance ultra-precision guideway accurately, a splicing measurement for the straightness error of a guideway using a high-precision flat mirror and displacement sensor was proposed in this paper, and the data splicing processing algorithm based on coordinate transformation was studied. Then, comparative experiments on a splicing measurement and direct measurement of the straightness error were carried out on a hydrostatic guideway grinder. The maximum difference between the two measurements was 0.3 μm, which was far less than the straightness error of 5.8 μm. The experiment demonstrated the correctness of the proposed splicing measurement method and data processing algorithm. To suppress the influence of the straightness error on machining accuracy, a straightness error compensation algorithm based on error rotation transformation and vertical axis position correction was proposed, and the grinding experiment of a plane optics with a size of 1400 mm × 500 mm was carried out. Without error compensation grinding, the flatness error of the element was 7.54 μm. After error compensation grinding, the flatness error was significantly reduced to 2.98 μm, which was less than the straightness errors of the guideways. These results demonstrated that the straightness error of the grinding machine had been well suppressed. Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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23 pages, 17716 KiB

Open AccessArticle

Enhancing EDM Machining Precision through Deep Cryogenically Treated Electrodes and ANN Modelling Approach

by Kashif Ishfaq, Muhammad Sana, Muhammad Umair Waseem, Waqar Muhammad Ashraf, Saqib Anwar and Jaroslaw Krzywanski

Micromachines 2023, 14(8), 1536; https://doi.org/10.3390/mi14081536 - 31 Jul 2023

Cited by 3 | Viewed by 1067

Abstract

The critical applications of difficult-to-machine Inconel 617 (IN617) compel the process to be accurate enough that the requirement of tight tolerances can be met. Electric discharge machining (EDM) is commonly engaged in its machining. However, the intrinsic issue of over/undercut in EDM complicates the achievement of accurately machined profiles. Therefore, the proficiency of deep cryogenically treated (DCT) copper (Cu) and brass electrodes under modified dielectrics has been thoroughly investigated to address the issue. A complete factorial design was implemented to machine a 300 μm deep impression on IN617. The machining ability of DCT electrodes averagely gave better dimensional accuracy as compared to non-DCT electrodes by 13.5% in various modified dielectric mediums. The performance of DCT brass is 29.7% better overall compared to the average value of overcut (OC) given by DCT electrodes. Among the non-treated (NT) electrodes, the performance of Cu stands out when employing a Kerosene-Span-20 modified dielectric. In comparison to Kerosene-Tween-80, the value of OC is 33.3% less if Kerosene-Span-20 is used as a dielectric against the aforementioned NT electrode. Finally, OC’s nonlinear and complex phenomena are effectively modeled by an artificial neural network (ANN) with good prediction accuracy, thereby eliminating the need for experiments. Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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16 pages, 5685 KiB

Open AccessArticle

A Method for Achieving Nanoscale Visual Positioning Measurement Based on Ultra-Precision Machining Microstructures

by Yihan Chen, Honglu Li, Zijian Zhu and Chenyang Zhao

Micromachines 2023, 14(7), 1444; https://doi.org/10.3390/mi14071444 - 19 Jul 2023

Cited by 1 | Viewed by 903

Abstract

Microscopic visual measurement is one of the main methods used for precision measurements. The observation morphology and image registration algorithm used in the measurement directly affect the accuracy and speed of the measurement. This paper analyzes the influence of morphology on different image registration algorithms through the imaging process of surface morphology and finds that complex morphology has more features, which can improve the accuracy of image registration. Therefore, the surface microstructure of ultra-precision machining is an ideal observation object. In addition, by comparing and analyzing the measurement results of commonly used image registration algorithms, we adopt a method of using the high-speed SURF algorithm for rough measurement and then combining the robust template-matching algorithm with image interpolation for precise measurements. Finally, this method has a repeatability of approximately 54 nm when measuring a planar displacement of 25 μm. Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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21 pages, 9804 KiB

Open AccessArticle

Differential Confocal Optical Probes with Optimized Detection Efficiency and Pearson Correlation Coefficient Strategy Based on the Peak-Clustering Algorithm

by Zhiyi Wang, Tingyu Wang, Yongqiang Yang, Xiaotao Mi and Jianli Wang

Micromachines 2023, 14(6), 1163; https://doi.org/10.3390/mi14061163 - 31 May 2023

Viewed by 986

Abstract

Quantifying free-form surfaces using differential confocal microscopy can be challenging, as it requires balancing accuracy and efficiency. When the axial scanning mechanism involves sloshing and the measured surface has a finite slope, traditional linear fitting can introduce significant errors. This study introduces a compensation strategy based on Pearson’s correlation coefficient to effectively reduce measurement errors. Additionally, a fast-matching algorithm based on peak clustering was proposed to meet real-time requirements for non-contact probes. To validate the effectiveness of the compensation strategy and matching algorithm, detailed simulations and physical experiments were conducted. The results showed that for a numerical aperture of 0.4 and a depth of slope < 12°, the measurement error was <10 nm, improving the speed of the traditional algorithm system by 83.37%. Furthermore, repeatability and anti-disturbance experiments demonstrated that the proposed compensation strategy is simple, efficient, and robust. Overall, the proposed method has significant potential for application in the realization of high-speed measurements of free-form surfaces. Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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14 pages, 12331 KiB

Open AccessArticle

Sustainable Dry Machining of Stainless Steel with Microwave-Treated Tungsten Carbide Cutting Tools

by Itemogeng Bernatt Babe, Kapil Gupta and Sujeet Kumar Chaubey

Micromachines 2023, 14(6), 1148; https://doi.org/10.3390/mi14061148 - 29 May 2023

Cited by 2 | Viewed by 1291

Abstract

This paper presents a research investigation conducted on the turning of stainless steel 316 material under a dry environment using microwave-treated cutting tool inserts. Plain tungsten carbide WC tool inserts were exposed to microwave treatment for enhancement of their performance characteristics. It was found that a 20-min microwave treatment resulted in the best tool hardness and metallurgical characteristics. These tool inserts have been used to machine SS 316 material following the Taguchi L₉ design of experimental techniques. A total of eighteen experiments have been conducted by varying three main machining parameters, i.e., cutting speed, feed rate, and depth of cut, at three levels per parameter. It has been found that tool flank wear increased with all three parameters and surface roughness decreased. At the longest dept of cut, surface roughness increased. An abrasion wear mechanism was found on the tool flank face at a high machining speed and adhesion at low speed. Chips with a helical shape and low serrations have been investigated. Turning SS 316 at optimum machining parameters of 170 m/min cutting speed, 0.2 mm/rev feed rate, and 1 mm depth of cut, as obtained by the multiperformance optimization technique grey relational analysis, resulted in the best values of all machinability indicators: 242.21 µm tool flank wear, 3.81 µm mean roughness depth, and 34,000 mm³/min material removal rate, at a single parameter setting. In terms of research achievements, the percentage reduction in surface roughness is approximately 30% and represents an almost ten-fold improvement in the material removal rate. The combination of machining parameters of 70 m/min cutting speed, 0.1 mm/rev feed rate, and 0.5 mm depth of cut is optimum for the lowest value of tool flank wear when considered for single parameter optimization. Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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13 pages, 9901 KiB

Open AccessArticle

Optimizing Processing Parameters and Surface Quality of TC18 via Ultrasonic-Assisted Milling (UAM): An Experimental Study

by Guangxi Li, Weibo Xie, Hongtao Wang, Yongbo Chai, Shaolin Zhang and Liquan Yang

Micromachines 2023, 14(6), 1111; https://doi.org/10.3390/mi14061111 - 25 May 2023

Cited by 4 | Viewed by 1044

Abstract

This study conducted longitudinal ultrasonic-assisted milling (UAM) tests and optimized a combination of milling technological parameters to achieve high-quality machining of TC18 titanium alloy. The motion paths of the cutter under the coupled superposition states of longitudinal ultrasonic vibration and end milling were analyzed. Based on the orthogonal test, the cutting forces, cutting temperatures, residual stresses, and surface topographical patterns of TC18 specimens under different UAM conditions (cutting speeds, feeds per tooth, cutting depths, and ultrasonic vibration amplitudes) were examined. The differences between ordinary milling and UAM in terms of machining performance were compared. Using UAM, numerous characteristics (including variable cutting thickness in the cutting area, variable cutting front angles of the tool, and the lifting of the cuttings by the tool) were optimized, reducing the average cutting force in all directions, lowering the cutting temperature, increasing the surface residual compressive stress, and significantly improving the surface morphology. Finally, fish scale bionic microtextures with clear, uniform, and regular patterns were formed on the machined surface. High-frequency vibration can improve material removal convenience, thus reducing surface roughness. The introduction of longitudinal ultrasonic vibration to the end milling process can overcome the limitations of traditional processing. The optimal combination of UAM parameters for titanium alloy machining was determined through the end milling orthogonal test with compound ultrasonic vibration, which significantly improved the surface quality of TC18 workpieces. This study provides insightful reference data for subsequent machining process optimization. Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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Review

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33 pages, 11611 KiB

Open AccessReview

Recent Advances in Precision Diamond Wire Sawing Monocrystalline Silicon

by Ansheng Li, Shunchang Hu, Yu Zhou, Hongyan Wang, Zhen Zhang and Wuyi Ming

Micromachines 2023, 14(8), 1512; https://doi.org/10.3390/mi14081512 - 27 Jul 2023

Cited by 1 | Viewed by 2092

Abstract

Due to the brittleness of silicon, the use of a diamond wire to cut silicon wafers is a critical stage in solar cell manufacturing. In order to improve the production yield of the cutting process, it is necessary to have a thorough understanding of the phenomena relating to the cutting parameters. This research reviews and summarizes the technology for the precision machining of monocrystalline silicon using diamond wire sawing (DWS). Firstly, mathematical models, molecular dynamics (MD), the finite element method (FEM), and other methods used for studying the principle of DWS are compared. Secondly, the equipment used for DWS is reviewed, the influences of the direction and magnitude of the cutting force on the material removal rate (MRR) are analyzed, and the improvement of silicon wafer surface quality through optimizing process parameters is summarized. Thirdly, the principles and processing performances of three assisted machining methods, namely ultrasonic vibration-assisted DWS (UV-DWS), electrical discharge vibration-assisted DWS (ED-DWS), and electrochemical-assisted DWS (EC-DWS), are reviewed separately. Finally, the prospects for the precision machining of monocrystalline silicon using DWS are provided, highlighting its significant potential for future development and improvement. Full article

(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications, Volume II)

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