Editor’s Choice Articles

Editor’s Choice articles are based on recommendations by the scientific editors of MDPI journals from around the world. Editors select a small number of articles recently published in the journal that they believe will be particularly interesting to readers, or important in the respective research area. The aim is to provide a snapshot of some of the most exciting work published in the various research areas of the journal.

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16 pages, 2599 KiB  
Article
Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers
by Roberto Bernasconi, Gabriele Pietro Invernizzi, Elisa Gallo Stampino, Riccardo Gotti, Davide Gatti and Luca Magagnin
Micromachines 2023, 14(11), 2082; https://doi.org/10.3390/mi14112082 - 10 Nov 2023
Cited by 1 | Viewed by 1075
Abstract
In the last few years, the manufacturing of microelectromechanical systems (MEMS) by means of innovative tridimensional and bidimensional printing technologies has significantly catalyzed the attention of researchers. Inkjet material deposition, in particular, can become a key enabling technology for the production of polymer-based [...] Read more.
In the last few years, the manufacturing of microelectromechanical systems (MEMS) by means of innovative tridimensional and bidimensional printing technologies has significantly catalyzed the attention of researchers. Inkjet material deposition, in particular, can become a key enabling technology for the production of polymer-based inertial sensors characterized by low cost, high manufacturing scalability and superior sensitivity. In this paper, a fully inkjet-printed polymeric accelerometer is proposed, and its manufacturing steps are described. The manufacturing challenges connected with the inkjet deposition of SU-8 as a structural material are identified and addressed, resulting in the production of a functional spring-mass sensor. A step-crosslinking process allows optimization of the final shape of the device and limits defects typical of inkjet printing. The resulting device is characterized from a morphological point of view, and its functionality is assessed in performing optical readout. The acceleration range of the optimized device is 0–0.7 g, its resolution is 2 × 10−3 g and its sensitivity is 6745 nm/g. In general, the work demonstrates the feasibility of polymeric accelerometer production via inkjet printing, and these characteristic parameters demonstrate their potential applicability in a broad range of uses requiring highly accurate acceleration measurements over small displacements. Full article
(This article belongs to the Special Issue MEMS in Italy 2023)
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19 pages, 7528 KiB  
Review
Patterning Techniques in Coplanar Micro/Nano Capacitive Sensors
by Seokwon Joo, Jung Yeon Han, Soonmin Seo and Ju-Hyung Kim
Micromachines 2023, 14(11), 2034; https://doi.org/10.3390/mi14112034 - 31 Oct 2023
Viewed by 1398
Abstract
Rapid technological advancements have led to increased demands for sensors. Hence, high performance suitable for next-generation technology is required. As sensing technology has numerous applications, various materials and patterning methods are used for sensor fabrication. This affects the characteristics and performance of sensors, [...] Read more.
Rapid technological advancements have led to increased demands for sensors. Hence, high performance suitable for next-generation technology is required. As sensing technology has numerous applications, various materials and patterning methods are used for sensor fabrication. This affects the characteristics and performance of sensors, and research centered specifically on these patterns is necessary for high integration and high performance of these devices. In this paper, we review the patterning techniques used in recently reported sensors, specifically the most widely used capacitive sensors, and their impact on sensor performance. Moreover, we introduce a method for increasing sensor performance through three-dimensional (3D) structures. Full article
(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)
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11 pages, 2942 KiB  
Article
The Efficient Energy Collection of an Autoregulatory Driving Arm Harvester in a Breeze Environment
by Chao Zhang, Xinlong Yang, Boren Zhang, Kangqi Fan, Zhiming Liu and Zejia Liu
Micromachines 2023, 14(11), 2032; https://doi.org/10.3390/mi14112032 - 31 Oct 2023
Viewed by 803
Abstract
Breezes are a common source of renewable energy in the natural world. However, effectively harnessing breeze energy is challenging with conventional wind generators. These generators have a relatively high start-up wind speed requirement due to their large and steady rotational inertia. This study [...] Read more.
Breezes are a common source of renewable energy in the natural world. However, effectively harnessing breeze energy is challenging with conventional wind generators. These generators have a relatively high start-up wind speed requirement due to their large and steady rotational inertia. This study puts forth the idea of an autoregulatory driving arm (ADA), utilizing a stretchable arm for every wind cup and an elastic thread to provide adjustable rotational inertia and a low start-up speed. The self-adjustable rotational inertia of the harvester is achieved through coordinated interaction between the centrifugal and elastic forces. As the wind speed varies, the arm length of the wind cup automatically adjusts, thereby altering the rotational inertia of the harvester. This self-adjustment mechanism allows the harvester to optimize its performance and adapt to different wind conditions. By implementing the suggested ADA harvester, a low start-up speed of 1 m/s is achieved due to the small rotational inertia in its idle state. With the escalation of wind speed, the amplified centrifugal force leads to the elongation of the driving arms. When compared to a comparable harvester with a constant driving arm (CDA), the ADA harvester can generate more power thanks to this stretching effect. Additionally, the ADA harvester can operate for a longer time than the CDA harvester even after the wind has stopped. This extended operation time enables the ADA harvester to serve as a renewable power source for sensors and other devices in natural breeze environments. By efficiently utilizing and storing energy, the ADA harvester ensures a continuous and reliable power supply in such settings. Full article
(This article belongs to the Special Issue Energy Conversion and Storage: From Materials to Devices)
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13 pages, 2108 KiB  
Article
An Analytical Thermal Buckling Model for Semiconductor Chips on a Substrate
by Guangping Gong, Dian Xu, Sijun Xiong, Fangyu Yi, Chengbo Wang and Rui Li
Micromachines 2023, 14(11), 2025; https://doi.org/10.3390/mi14112025 - 30 Oct 2023
Viewed by 977
Abstract
Semiconductor chips on a substrate have a wide range of applications in electronic devices. However, environmental temperature changes may cause mechanical buckling of the chips, resulting in an urgent demand to develop analytical models to study this issue with high efficiency and accuracy [...] Read more.
Semiconductor chips on a substrate have a wide range of applications in electronic devices. However, environmental temperature changes may cause mechanical buckling of the chips, resulting in an urgent demand to develop analytical models to study this issue with high efficiency and accuracy such that safety designs can be sought. In this paper, the thermal buckling of chips on a substrate is considered as that of plates on a Winkler elastic foundation and is studied by the symplectic superposition method (SSM) within the symplectic space-based Hamiltonian system. The solution procedure starts by converting the original problem into two subproblems, which are solved by using the separation of variables and the symplectic eigenvector expansion. Through the equivalence between the original problem and the superposition of subproblems, the final analytical thermal buckling solutions are obtained. The SSM does not require any assumptions of solution forms, which is a distinctive advantage compared with traditional analytical methods. Comprehensive numerical results by the SSM for both buckling temperatures and mode shapes are presented and are well validated through comparison with those using the finite element method. With the solutions obtained, the effects of the moduli of elastic foundations and geometric parameters on critical buckling temperatures and buckling mode shapes are investigated. Full article
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13 pages, 3025 KiB  
Article
Thomson–Einstein’s Tea Leaf Paradox Revisited: Aggregation in Rings
by Kirill Kolesnik, Daniel Quang Le Pham, Jessica Fong and David John Collins
Micromachines 2023, 14(11), 2024; https://doi.org/10.3390/mi14112024 - 30 Oct 2023
Viewed by 1291
Abstract
A distinct particle focusing spot occurs in the center of a rotating fluid, presenting an apparent paradox given the presence of particle inertia. It is recognized, however, that the presence of a secondary flow with a radial component drives this particle aggregation. In [...] Read more.
A distinct particle focusing spot occurs in the center of a rotating fluid, presenting an apparent paradox given the presence of particle inertia. It is recognized, however, that the presence of a secondary flow with a radial component drives this particle aggregation. In this study, we expand on the examination of this “Thomson–Einstein’s tea leaf paradox” phenomenon, where we use a combined experimental and computational approach to investigate particle aggregation dynamics. We show that not only the rotational velocity, but also the vessel shape, have a significant influence on a particle’s equilibrium position. We accordingly demonstrate the formation of a single focusing spot in a vessel center, as has been conclusively demonstrated elsewhere, but also the repeatable formation of stable ring-shaped particle arrangements. Full article
(This article belongs to the Special Issue Micro-Tweezers, Integrated Sensors and Micro-Manipulations Techniques)
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13 pages, 3845 KiB  
Article
Surface Roughness Prediction in Ultra-Precision Milling: An Extreme Learning Machine Method with Data Fusion
by Suiyan Shang, Chunjin Wang, Xiaoliang Liang, Chi Fai Cheung and Pai Zheng
Micromachines 2023, 14(11), 2016; https://doi.org/10.3390/mi14112016 - 29 Oct 2023
Cited by 1 | Viewed by 1229
Abstract
This paper pioneers the use of the extreme learning machine (ELM) approach for surface roughness prediction in ultra-precision milling, leveraging the excellent fitting ability with small datasets and the fast learning speed of the extreme learning machine method. By providing abundant machining information, [...] Read more.
This paper pioneers the use of the extreme learning machine (ELM) approach for surface roughness prediction in ultra-precision milling, leveraging the excellent fitting ability with small datasets and the fast learning speed of the extreme learning machine method. By providing abundant machining information, the machining parameters and force signal data are fused on the feature level to further improve ELM prediction accuracy. An ultra-precision milling experiment was designed and conducted to verify our proposed data-fusion-based ELM method. The results show that the ELM with data fusion outperforms other state-of-art methods in surface roughness prediction. It achieves an impressively low mean absolute percentage error of 1.6% while requiring a mere 18 s for model training. Full article
(This article belongs to the Special Issue Intelligent Precision Machining)
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38 pages, 3783 KiB  
Review
Analytical Gas Sensing in the Terahertz Spectral Range
by Andreja Abina, Uroš Puc, Mojca Jazbinšek and Aleksander Zidanšek
Micromachines 2023, 14(11), 1987; https://doi.org/10.3390/mi14111987 - 27 Oct 2023
Viewed by 1741
Abstract
Exploiting the terahertz (THz) part of the electromagnetic spectrum is attracting attention in various scientific and applied disciplines worldwide. THz technology has also revealed its potential as an effective tool for gas analysis in astronomy, biomedicine and chemical analysis. Recently, it has also [...] Read more.
Exploiting the terahertz (THz) part of the electromagnetic spectrum is attracting attention in various scientific and applied disciplines worldwide. THz technology has also revealed its potential as an effective tool for gas analysis in astronomy, biomedicine and chemical analysis. Recently, it has also become important in environmental applications for monitoring hazardous and toxic gases in the atmosphere. This paper gives an overview of THz gas detection analytical methods for environmental and biomedical applications, starting with a brief introduction to THz technology and an explanation of the interaction of THz radiation with gaseous species and the atmosphere. The review focuses on several gaseous species and groups of air pollutants that have been or can be analysed by THz spectrometry. The review concludes that different but complementary THz detection methods allow unique detection, identification and quantification of gaseous and particulate air pollutants with high selectivity, specificity and sensitivity. THz detection methods also allow further technological improvements and open new application possibilities. Full article
(This article belongs to the Special Issue Photon-Driven Technologies: Exploring the Latest Advancements)
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13 pages, 7166 KiB  
Article
Electric-Force Conversion Performance of Si-Based LiNbO3 Devices Based on Four Cantilever Beams
by Huiyi Zhang, Xiaojun Qiao, Huifen Wei, Xiaohuang Li, Xiaohui Wu, Nanxin Yu, Hao Lu, Tao Guo, Xiujian Chou and Wenping Geng
Micromachines 2023, 14(11), 1988; https://doi.org/10.3390/mi14111988 - 27 Oct 2023
Viewed by 1048
Abstract
In micron or nano smart sensing systems, piezoelectric cantilever beams are distributed as major components in microsensors, actuators, and energy harvesters. This paper investigates the performance of four cantilever beam devices with “electric-force” conversion based on the inverse piezoelectric effect of lithium niobate [...] Read more.
In micron or nano smart sensing systems, piezoelectric cantilever beams are distributed as major components in microsensors, actuators, and energy harvesters. This paper investigates the performance of four cantilever beam devices with “electric-force” conversion based on the inverse piezoelectric effect of lithium niobate (LiNbO3, LN) single-crystal materials. A new compact piezoelectric smart device model is proposed, designed as a single mass block connected by four beams, where devices exhibit smaller lateral errors (0.39–0.41%). The relationship between the displacement characteristics of cantilever beams and driving voltage was researched by applying excitation signals. The results show that the device has the maximum displacement at a first-order intrinsic frequency (fosc = 11.338 kHz), while the displacement shows a good linear relationship (R2 = 0.998) with driving voltage. The square wave signals of the same amplitude have greater “electrical-force” conversion efficiency. The output displacement can reach 12 nm, which is much higher than the output displacement with sinusoidal excitation. In addition, the relative displacement deviation of devices can be maintained within ±1% under multiple cycles of electrical signal loading. The small size, high reliability, and ultra-stability of Si–LN ferroelectric single-crystal cantilever beam devices with lower vibration amplitudes are promising for nanopositioning techniques in microscopy, diagnostics, and high-precision manufacturing applications. Full article
(This article belongs to the Topic Piezoelectric Materials and Applications)
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11 pages, 4102 KiB  
Article
Construction of MoS2-ReS2 Hybrid on Ti3C2Tx MXene for Enhanced Microwave Absorption
by Xiaoxuan Xu, Youqiang Xing and Lei Liu
Micromachines 2023, 14(11), 1996; https://doi.org/10.3390/mi14111996 - 27 Oct 2023
Viewed by 818
Abstract
Utilizing interface engineering to construct abundant heterogeneous interfaces is an important means to improve the absorbing performance of microwave absorbers. Here, we have prepared the MXene/MoS2-ReS2 (MMR) composite with rich heterogeneous interfaces composed of two-dimensional Ti3C2Tx [...] Read more.
Utilizing interface engineering to construct abundant heterogeneous interfaces is an important means to improve the absorbing performance of microwave absorbers. Here, we have prepared the MXene/MoS2-ReS2 (MMR) composite with rich heterogeneous interfaces composed of two-dimensional Ti3C2Tx MXene and two-dimensional transition metal disulfides through a facile hydrothermal process. The surface of MXene is completely covered by nanosheets of MoS2 and ReS2, forming a hybrid structure. MRR exhibits excellent absorption performance, with its strongest reflection loss reaching −51.15 dB at 2.0 mm when the filling ratio is only 10 wt%. Meanwhile, the effective absorption bandwidth covers the range of 5.5–18 GHz. Compared to MXene/MoS2 composites, MRR with a MoS2-ReS2 heterogeneous interface exhibits stronger polarization loss ability and superior absorption efficiency at the same thickness. This study provides a reference for the design of transition metal disulfides-based absorbing materials. Full article
(This article belongs to the Special Issue Semiconductors and Nanostructures for Electronics and Photonics)
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16 pages, 7440 KiB  
Article
Tackling Multi-Physics Nano-Scale Phenomena in Capillary Force Lithography with Small Data by Hybrid Intelligence
by Ashish Chapagain and In Ho Cho
Micromachines 2023, 14(11), 1984; https://doi.org/10.3390/mi14111984 - 26 Oct 2023
Viewed by 747
Abstract
The scientific community has been looking for novel approaches to develop nanostructures inspired by nature. However, due to the complicated processes involved, controlling the height of these nanostructures is challenging. Nanoscale capillary force lithography (CFL) is one way to use a photopolymer and [...] Read more.
The scientific community has been looking for novel approaches to develop nanostructures inspired by nature. However, due to the complicated processes involved, controlling the height of these nanostructures is challenging. Nanoscale capillary force lithography (CFL) is one way to use a photopolymer and alter its properties by exposing it to ultraviolet radiation. Nonetheless, the working mechanism of CFL is not fully understood due to a lack of enough information and first principles. One of these obscure behaviors is the sudden jump phenomenon—the sudden change in the height of the photopolymer depending on the UV exposure time and height of nano-grating (based on experimental data). This paper uses known physical principles alongside artificial intelligence to uncover the unknown physical principles responsible for the sudden jump phenomenon. The results showed promising results in identifying air diffusivity, dynamic viscosity, surface tension, and electric potential as the previously unknown physical principles that collectively explain the sudden jump phenomenon. Full article
(This article belongs to the Special Issue Micromachines Research and Development in North America)
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10 pages, 1721 KiB  
Article
High-Performance Vertical Light-Emitting Transistors Based on ZnO Transistor/Quantum-Dot Light-Emitting Diode Integration and Electron Injection Layer Modification
by Jui-Fen Chang and Jia-Min Yu
Micromachines 2023, 14(10), 1933; https://doi.org/10.3390/mi14101933 - 15 Oct 2023
Viewed by 1328
Abstract
Vertical light-emitting transistors (VLETs) consisting of vertically stacked unipolar transistors and organic light-emitting diodes (OLEDs) have been proposed as a prospective building block for display technologies. In addition to OLEDs, quantum-dot (QD) LEDs (QLEDs) with high brightness and high color purity have also [...] Read more.
Vertical light-emitting transistors (VLETs) consisting of vertically stacked unipolar transistors and organic light-emitting diodes (OLEDs) have been proposed as a prospective building block for display technologies. In addition to OLEDs, quantum-dot (QD) LEDs (QLEDs) with high brightness and high color purity have also become attractive light-emitting devices for display applications. However, few studies have attempted to integrate QLEDs into VLETs, as this not only involves technical issues such as compatible solution process of QDs and fine patterning of electrodes in multilayer stacked geometries but also requires a high driving current that is demanding on transistor design. Here we show that these integration issues of QLEDs can be addressed by using inorganic transistors with robust processability and high mobility, such as the studied ZnO transistor, which facilitates simple fabrication of QD VLETs (QVLETs) with efficient emission in the patterned channel area, suitable for high-resolution display applications. We perform a detailed optimization of QVLET by modifying ZnO:polyethylenimine nanocomposite as the electron injection layer (EIL) between the integrated ZnO transistor/QLED, and achieve the highest external quantum efficiency of ~3% and uniform emission in the patterned transistor channel. Furthermore, combined with a systematic study of corresponding QLEDs, electron-only diodes, and electroluminescence images, we provide a deeper understanding of the effect of EIL modification on current balance and distribution, and thus on QVLET performance. Full article
(This article belongs to the Special Issue Thin-Film Transistors: Materials, Fabrications and Applications)
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33 pages, 4097 KiB  
Review
Advancements in Wearable and Implantable Intraocular Pressure Biosensors for Ophthalmology: A Comprehensive Review
by Kevin Y. Wu, Mina Mina, Marjorie Carbonneau, Michael Marchand and Simon D. Tran
Micromachines 2023, 14(10), 1915; https://doi.org/10.3390/mi14101915 - 9 Oct 2023
Cited by 1 | Viewed by 2047
Abstract
Glaucoma, marked by its intricate association with intraocular pressure (IOP), stands as a predominant cause of non-reversible vision loss. In this review, the physiological relevance of IOP is detailed, alongside its potential pathological consequences. The review further delves into innovative engineering solutions for [...] Read more.
Glaucoma, marked by its intricate association with intraocular pressure (IOP), stands as a predominant cause of non-reversible vision loss. In this review, the physiological relevance of IOP is detailed, alongside its potential pathological consequences. The review further delves into innovative engineering solutions for IOP monitoring, highlighting the latest advancements in wearable and implantable sensors and their potential in enhancing glaucoma management. These technological innovations are interwoven with clinical practice, underscoring their real-world applications, patient-centered strategies, and the prospects for future development in IOP control. By synthesizing theoretical concepts, technological innovations, and practical clinical insights, this review contributes a cohesive and comprehensive perspective on the IOP biosensor’s role in glaucoma, serving as a reference for ophthalmological researchers, clinicians, and professionals. Full article
(This article belongs to the Special Issue Feature Reviews in Micromachines 2023)
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17 pages, 2804 KiB  
Article
Orange Carotenoid Protein in Mesoporous Silica: A New System towards the Development of Colorimetric and Fluorescent Sensors for pH and Temperature
by Silvia Leccese, Andrea Calcinoni, Adjélé Wilson, Diana Kirilovsky, Donatella Carbonera, Thomas Onfroy, Claude Jolivalt and Alberto Mezzetti
Micromachines 2023, 14(10), 1871; https://doi.org/10.3390/mi14101871 - 29 Sep 2023
Viewed by 877
Abstract
Orange carotenoid protein (OCP) is a photochromic carotenoprotein involved in the photoprotection of cyanobacteria. It is activated by blue-green light to a red form OCPR capable of dissipating the excess of energy of the cyanobacterial photosynthetic light-harvesting systems. Activation to OCPR [...] Read more.
Orange carotenoid protein (OCP) is a photochromic carotenoprotein involved in the photoprotection of cyanobacteria. It is activated by blue-green light to a red form OCPR capable of dissipating the excess of energy of the cyanobacterial photosynthetic light-harvesting systems. Activation to OCPR can also be achieved in the dark. In the present work, activation by pH changes of two different OCPs—containing echinenone or canthaxanthin as carotenoids—is investigated in different conditions. A particular emphasis is put on OCP encapsulated in SBA-15 mesoporous silica nanoparticles. It is known that in these hybrid systems, under appropriate conditions, OCP remains photoactive. Here, we show that when immobilised in SBA-15, the OCP visible spectrum is sensitive to pH changes, but such a colorimetric response is very different from the one observed for OCP in solution. In both cases (SBA-15 matrices and solutions), pH-induced colour changes are related either by orange-to-red OCP activation, or by carotenoid loss from the denatured protein. Of particular interest is the response of OCP in SBA-15 matrices, where a sudden change in the Vis absorption spectrum and in colour is observed for pH changing from 2 to 3 (in the case of canthaxanthin-binding OCP in SBA-15: λMAX shifts from 454 to 508 nm) and for pH changing from 3 to 4 (in the case of echinenone-binding OCP in SBA-15: λMAX shifts from 445 to 505 nm). The effect of temperature on OCP absorption spectrum and colour (in SBA-15 matrices) has also been investigated and found to be highly dependent on the properties of the used mesoporous silica matrix. Finally, we also show that simultaneous encapsulation in selected surface-functionalised SBA-15 nanoparticles of appropriate fluorophores makes it possible to develop OCP-based pH-sensitive fluorescent systems. This work therefore represents a proof of principle that OCP immobilised in mesoporous silica is a promising system in the development of colorimetric and fluorometric pH and temperature sensors. Full article
(This article belongs to the Section C:Chemistry)
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15 pages, 3296 KiB  
Article
Integration of Inkjet Printed Graphene as a Hole Transport Layer in Organic Solar Cells
by Julia Kastner, Flavia Tomarchio, Nicolas Decorde, Matthias Kehrer, Günter Hesser and Anita Fuchsbauer
Micromachines 2023, 14(10), 1858; https://doi.org/10.3390/mi14101858 - 28 Sep 2023
Viewed by 1012
Abstract
This work demonstrates the green production of a graphene ink for inkjet printing and its use as a hole transport layer (HTL) in an organic solar cell. Graphene as an HTL improves the selective hole extraction at the anode and prevents charge recombination [...] Read more.
This work demonstrates the green production of a graphene ink for inkjet printing and its use as a hole transport layer (HTL) in an organic solar cell. Graphene as an HTL improves the selective hole extraction at the anode and prevents charge recombination at the electronic interface and metal diffusion into the photoactive layer. Graphite was exfoliated in water, concentrated by iterative centrifugation, and characterized by Raman. The concentrated graphene ink was incorporated into inverted organic solar cells by inkjet printing on the active polymer in an ambient atmosphere. Argon plasma was used to enhance wetting of the polymer with the graphene ink during printing. The argon plasma treatment of the active polymer P3HT:PCBM was investigated by XPS, AFM and contact angle measurements. Efficiency and lifetime studies undertaken show that the device with graphene as HTL is fully functional and has good potential for an inkjet printable and flexible alternative to PEDOT:PSS. Full article
(This article belongs to the Special Issue Graphene-Based Metamaterial Solar Energy Devices)
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18 pages, 3490 KiB  
Article
Scalable Processing of Cyclic Olefin Copolymer (COC) Microfluidic Biochips
by Rodolfo G. Rodrigues, Pedro G. M. Condelipes, Rafaela R. Rosa, Virginia Chu and João Pedro Conde
Micromachines 2023, 14(10), 1837; https://doi.org/10.3390/mi14101837 - 27 Sep 2023
Viewed by 1234
Abstract
Microfluidics evolved with the appearance of polydimethylsiloxane (PDMS), an elastomer with a short processing time and the possibility for replication on a micrometric scale. Despite the many advantages of PDMS, there are well-known drawbacks, such as the hydrophobic surface, the absorption of small [...] Read more.
Microfluidics evolved with the appearance of polydimethylsiloxane (PDMS), an elastomer with a short processing time and the possibility for replication on a micrometric scale. Despite the many advantages of PDMS, there are well-known drawbacks, such as the hydrophobic surface, the absorption of small molecules, the low stiffness, relatively high cost, and the difficulty of scaling up the fabrication process for industrial production, creating a need for alternative materials. One option is the use of stiffer thermoplastics, such as the cyclic olefin copolymer (COC), which can be mass produced, have lower cost and possess excellent properties. In this work, a method to fabricate COC microfluidic structures was developed. The work was divided into process optimization and evaluation of material properties for application in microfluidics. In the processing step, moulding, sealing, and liquid handling aspects were developed and optimized. The resulting COC devices were evaluated from the point of view of molecular diffusion, burst pressure, temperature resistance, and susceptibility to surface treatments and these results were compared to PDMS devices. Lastly, a target DNA hybridization assay was performed showing the potential of the COC-based microfluidic device to be used in biosensing and Lab-on-a-Chip applications. Full article
(This article belongs to the Special Issue Novel Functional Materials and Techniques for 3D-Microfabrication)
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11 pages, 2798 KiB  
Article
A BTO/PVDF/PDMS Piezoelectric Tangential and Normal Force Sensor Inspired by a Wind Chime
by Chunyan Zhang, Xiaotian Zhang, Qiang Zhang, Shengbo Sang, Jianlong Ji, Runfang Hao and Yan Liu
Micromachines 2023, 14(10), 1848; https://doi.org/10.3390/mi14101848 - 27 Sep 2023
Viewed by 1038
Abstract
There is a growing demand for flexible pressure sensors in environmental monitoring and human–robot interaction robotics. A flexible and susceptible sensor can discriminate multidirectional pressure, thus effectively detecting signals of small environmental changes and providing solutions for personalized medicine. This paper proposes a [...] Read more.
There is a growing demand for flexible pressure sensors in environmental monitoring and human–robot interaction robotics. A flexible and susceptible sensor can discriminate multidirectional pressure, thus effectively detecting signals of small environmental changes and providing solutions for personalized medicine. This paper proposes a multidimensional force detection sensor inspired by a wind chime structure with a three-dimensional force structure to detect and analyze normal and shear forces in real time. The force-sensing structure of the sensor consists of an upper and lower membrane on a polydimethylsiloxane substrate and four surrounding cylinders. A piezoelectric hemisphere is made of BTO/PVDF/PDMS composite material. The sensor columns in the wind chime structure surround the piezoelectric layer in the middle. When pressure is applied externally, the sensor columns are connected to the piezoelectric layer with a light touch. The piezoelectric hemisphere generates a voltage signal. Due to the particular structure of the sensor, it can accurately capture multidimensional forces and identify the direction of the external force by analyzing the position of the sensor and the output voltage amplitude. The development of such sensors shows excellent potential for self-powered wearable sensors, human–computer interaction, electronic skin, and soft robotics applications. Full article
(This article belongs to the Special Issue Flexible and Wearable Sensors, 2nd Edition)
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26 pages, 5246 KiB  
Review
Microfluidic Mixing: A Physics-Oriented Review
by Sri Manikandan Saravanakumar and Paul-Vahe Cicek
Micromachines 2023, 14(10), 1827; https://doi.org/10.3390/mi14101827 - 25 Sep 2023
Cited by 5 | Viewed by 1691
Abstract
This comprehensive review paper focuses on the intricate physics of microfluidics and their application in micromixing techniques. Various methods for enhancing mixing in microchannels are explored, with a keen emphasis on the underlying fluid dynamics principles. Geometrical micromixers employ complex channel designs to [...] Read more.
This comprehensive review paper focuses on the intricate physics of microfluidics and their application in micromixing techniques. Various methods for enhancing mixing in microchannels are explored, with a keen emphasis on the underlying fluid dynamics principles. Geometrical micromixers employ complex channel designs to induce fluid–fluid interface distortions, yielding efficient mixing while retaining manufacturing simplicity. These methods synergize effectively with external techniques, showcasing promising potential. Electrohydrodynamics harnesses electrokinetic phenomena like electroosmosis, electrophoresis, and electrothermal effects. These methods offer dynamic control over mixing parameters via applied voltage, frequency, and electrode positioning, although power consumption and heating can be drawbacks. Acoustofluidics leverages acoustic waves to drive microstreaming, offering localized yet far-reaching effects. Magnetohydrodynamics, though limited in applicability to certain fluids, showcases potential by utilizing magnetic fields to propel mixing. Selecting an approach hinges on trade-offs among complexity, efficiency, and compatibility with fluid properties. Understanding the physics of fluid behavior and rationalizing these techniques aids in tailoring the most suitable micromixing solution. In a rapidly advancing field, this paper provides a consolidated understanding of these techniques, facilitating the informed choice of approach for specific microfluidic mixing needs. Full article
(This article belongs to the Special Issue Feature Papers from Micromachines Reviewers 2023)
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17 pages, 2046 KiB  
Article
Rapid Production of Nanoscale Liposomes Using a 3D-Printed Reactor-In-A-Centrifuge: Formulation, Characterisation, and Super-Resolution Imaging
by Yongqing He, Davide De Grandi, Stanley Chandradoss, Gareth LuTheryn, Gianluca Cidonio, Ricardo Nunes Bastos, Valerio Pereno and Dario Carugo
Micromachines 2023, 14(9), 1763; https://doi.org/10.3390/mi14091763 - 12 Sep 2023
Cited by 2 | Viewed by 1613
Abstract
Nanoscale liposomes have been extensively researched and employed clinically for the delivery of biologically active compounds, including chemotherapy drugs and vaccines, offering improved pharmacokinetic behaviour and therapeutic outcomes. Traditional laboratory-scale production methods often suffer from limited control over liposome properties (e.g., size and [...] Read more.
Nanoscale liposomes have been extensively researched and employed clinically for the delivery of biologically active compounds, including chemotherapy drugs and vaccines, offering improved pharmacokinetic behaviour and therapeutic outcomes. Traditional laboratory-scale production methods often suffer from limited control over liposome properties (e.g., size and lamellarity) and rely on laborious multistep procedures, which may limit pre-clinical research developments and innovation in this area. The widespread adoption of alternative, more controllable microfluidic-based methods is often hindered by complexities and costs associated with device manufacturing and operation, as well as the short device lifetime and the relatively low liposome production rates in some cases. In this study, we demonstrated the production of liposomes comprising therapeutically relevant lipid formulations, using a cost-effective 3D-printed reactor-in-a-centrifuge (RIAC) device. By adjusting formulation- and production-related parameters, including the concentration of polyethylene glycol (PEG), temperature, centrifugation time and speed, and lipid concentration, the mean size of the produced liposomes could be tuned in the range of 140 to 200 nm. By combining selected experimental parameters, the method was capable of producing liposomes with a therapeutically relevant mean size of ~174 nm with narrow size distribution (polydispersity index, PDI ~0.1) at a production rate of >8 mg/min. The flow-through method proposed in this study has potential to become an effective and versatile laboratory-scale approach to simplify the synthesis of therapeutic liposomal formulations. Full article
(This article belongs to the Special Issue Feature Papers of Micromachines in Biology and Biomedicine 2022)
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25 pages, 5364 KiB  
Review
Point-of-Care Devices for Viral Detection: COVID-19 Pandemic and Beyond
by Sumit K. Yadav, Damini Verma, Ujala Yadav, Ashish Kalkal, Nivedita Priyadarshini, Ashutosh Kumar and Kuldeep Mahato
Micromachines 2023, 14(9), 1744; https://doi.org/10.3390/mi14091744 - 7 Sep 2023
Cited by 4 | Viewed by 1389
Abstract
The pandemic of COVID-19 and its widespread transmission have made us realize the importance of early, quick diagnostic tests for facilitating effective cure and management. The primary obstacles encountered were accurately distinguishing COVID-19 from other illnesses including the flu, common cold, etc. While [...] Read more.
The pandemic of COVID-19 and its widespread transmission have made us realize the importance of early, quick diagnostic tests for facilitating effective cure and management. The primary obstacles encountered were accurately distinguishing COVID-19 from other illnesses including the flu, common cold, etc. While the polymerase chain reaction technique is a robust technique for the determination of SARS-CoV-2 in patients of COVID-19, there arises a high demand for affordable, quick, user-friendly, and precise point-of-care (POC) diagnostic in therapeutic settings. The necessity for available tests with rapid outcomes spurred the advancement of POC tests that are characterized by speed, automation, and high precision and accuracy. Paper-based POC devices have gained increasing interest in recent years because of rapid, low-cost detection without requiring external instruments. At present, microfluidic paper-based analysis devices have garnered public attention and accelerated the development of such POCT for efficient multistep assays. In the current review, our focus will be on the fabrication of detection modules for SARS-CoV-2. Here, we have included a discussion on various strategies for the detection of viral moieties. The compilation of these strategies would offer comprehensive insight into the detection of the causative agent preparedness for future pandemics. We also provide a descriptive outline for paper-based diagnostic platforms, involving the determination mechanisms, as well as a commercial kit for COVID-19 as well as their outlook. Full article
(This article belongs to the Special Issue Microfluidics and Biosensors for Point-of-Care Applications)
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22 pages, 6112 KiB  
Review
Carbon-Based Electrochemical (Bio)sensors for the Detection of Carbendazim: A Review
by Constanza J. Venegas, Soledad Bollo and Paulina Sierra-Rosales
Micromachines 2023, 14(9), 1752; https://doi.org/10.3390/mi14091752 - 7 Sep 2023
Cited by 1 | Viewed by 1060
Abstract
Carbendazim, a fungicide widely used in agriculture, has been classified as a hazardous chemical by the World Health Organization due to its environmental persistence. It is prohibited in several countries; therefore, detecting it in food and environmental samples is highly necessary. A reliable, [...] Read more.
Carbendazim, a fungicide widely used in agriculture, has been classified as a hazardous chemical by the World Health Organization due to its environmental persistence. It is prohibited in several countries; therefore, detecting it in food and environmental samples is highly necessary. A reliable, rapid, and low-cost method uses electrochemical sensors and biosensors, especially those modified with carbon-based materials with good analytical performance. In this review, we summarize the use of carbon-based electrochemical (bio)sensors for detecting carbendazim in environmental and food matrixes, with a particular interest in the role of carbon materials. Focus on publications between 2018 and 2023 that have been describing the use of carbon nanotubes, carbon nitride, graphene, and its derivatives, and carbon-based materials as modifiers, emphasizing the analytical performance obtained, such as linear range, detection limit, selectivity, and the matrix where the detection was applied. Full article
(This article belongs to the Special Issue Carbon-Based Electrodes for Electrochemical Analysis and Detection)
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13 pages, 1422 KiB  
Article
High-Frequency Dielectrophoresis Reveals That Distinct Bio-Electric Signatures of Colorectal Cancer Cells Depend on Ploidy and Nuclear Volume
by Josie L. Duncan, Mathew Bloomfield, Nathan Swami, Daniela Cimini and Rafael V. Davalos
Micromachines 2023, 14(9), 1723; https://doi.org/10.3390/mi14091723 - 1 Sep 2023
Viewed by 1072
Abstract
Aneuploidy, or an incorrect chromosome number, is ubiquitous among cancers. Whole-genome duplication, resulting in tetraploidy, often occurs during the evolution of aneuploid tumors. Cancers that evolve through a tetraploid intermediate tend to be highly aneuploid and are associated with poor patient prognosis. The [...] Read more.
Aneuploidy, or an incorrect chromosome number, is ubiquitous among cancers. Whole-genome duplication, resulting in tetraploidy, often occurs during the evolution of aneuploid tumors. Cancers that evolve through a tetraploid intermediate tend to be highly aneuploid and are associated with poor patient prognosis. The identification and enrichment of tetraploid cells from mixed populations is necessary to understand the role these cells play in cancer progression. Dielectrophoresis (DEP), a label-free electrokinetic technique, can distinguish cells based on their intracellular properties when stimulated above 10 MHz, but DEP has not been shown to distinguish tetraploid and/or aneuploid cancer cells from mixed tumor cell populations. Here, we used high-frequency DEP to distinguish cell subpopulations that differ in ploidy and nuclear size under flow conditions. We used impedance analysis to quantify the level of voltage decay at high frequencies and its impact on the DEP force acting on the cell. High-frequency DEP distinguished diploid cells from tetraploid clones due to their size and intracellular composition at frequencies above 40 MHz. Our findings demonstrate that high-frequency DEP can be a useful tool for identifying and distinguishing subpopulations with nuclear differences to determine their roles in disease progression. Full article
(This article belongs to the Special Issue Micromachines for Dielectrophoresis, 3rd Edition)
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20 pages, 7459 KiB  
Article
Virtual Coriolis-Force-Based Mode-Matching Micromachine-Optimized Tuning Fork Gyroscope without a Quadrature-Nulling Loop
by Yixuan Wu, Weizheng Yuan, Yanjun Xue, Honglong Chang and Qiang Shen
Micromachines 2023, 14(9), 1704; https://doi.org/10.3390/mi14091704 - 31 Aug 2023
Cited by 1 | Viewed by 953
Abstract
A VCF-based mode-matching micromachine-optimized tuning fork gyroscope is proposed to not only maximize the scale factor of the device, but also avoid use of an additional quadrature-nulling loop to prevent structure complexity, pick-up electrode occupation, and coupling with a mode-matching loop. In detail, [...] Read more.
A VCF-based mode-matching micromachine-optimized tuning fork gyroscope is proposed to not only maximize the scale factor of the device, but also avoid use of an additional quadrature-nulling loop to prevent structure complexity, pick-up electrode occupation, and coupling with a mode-matching loop. In detail, a mode-matching, closed-loop system without a quadrature-nulling loop is established, and the corresponding convergence and matching error are quantitatively analyzed. The optimal straight beam of the gyro structure is then modeled to significantly reduce the quadrature coupling. The test results show that the frequency split is narrowed from 20 Hz to 0.014 Hz. The scale factor is improved 20.6 times and the bias instability (BI) is suppressed 3.28 times. The observed matching accuracy demonstrates that a mode matching system without a quadrature suppression loop is feasible and that the proposed device represents a competitive design for a mode-matching gyroscope. Full article
(This article belongs to the Special Issue MEMS Inertial Device)
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10 pages, 9758 KiB  
Article
Nano Groove and Prism-Structured Triboelectric Nanogenerators
by Resul Saritas, Majed Al-Ghamdi, Taylan Memik Das, Omar Rasheed, Samed Kocer, Ahmet Gulsaran, Asif Abdullah Khan, Md Masud Rana, Mahmoud Khater, Muhammed Kayaharman, Dayan Ban, Mustafa Yavuz and Eihab Abdel-Rahman
Micromachines 2023, 14(9), 1707; https://doi.org/10.3390/mi14091707 - 31 Aug 2023
Viewed by 1489
Abstract
Enhancing the output power of triboelectric nanogenerators (TENGs) requires the creation of micro or nano-features on polymeric triboelectric surfaces to increase the TENGs’ effective contact area and, therefore, output power. We deploy a novel bench-top fabrication method called dynamic Scanning Probe Lithography (d-SPL) [...] Read more.
Enhancing the output power of triboelectric nanogenerators (TENGs) requires the creation of micro or nano-features on polymeric triboelectric surfaces to increase the TENGs’ effective contact area and, therefore, output power. We deploy a novel bench-top fabrication method called dynamic Scanning Probe Lithography (d-SPL) to fabricate massive arrays of uniform 1 cm long and 2.5 µm wide nano-features comprising a 600 nm deep groove (NG) and a 600 nm high triangular prism (NTP). The method creates both features simultaneously in the polymeric surface, thereby doubling the structured surface area. Six thousand pairs of NGs and NTPs were patterned on a 6×5 cm2 PMMA substrate. It was then used as a mold to structure the surface of a 200 µm thick Polydimethylsiloxane (PDMS) layer. We show that the output power of the nano-structured TENG is significantly more than that of a TENG using flat PDMS films, at 12.2 mW compared to 2.2 mW, under the same operating conditions (a base acceleration amplitude of 0.8 g). Full article
(This article belongs to the Topic Advanced Energy Harvesting Technology)
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26 pages, 3442 KiB  
Review
Novel Artificial Intelligence-Based Approaches for Ab Initio Structure Determination and Atomic Model Building for Cryo-Electron Microscopy
by Megan C. DiIorio and Arkadiusz W. Kulczyk
Micromachines 2023, 14(9), 1674; https://doi.org/10.3390/mi14091674 - 27 Aug 2023
Cited by 2 | Viewed by 1940
Abstract
Single particle cryo-electron microscopy (cryo-EM) has emerged as the prevailing method for near-atomic structure determination, shedding light on the important molecular mechanisms of biological macromolecules. However, the inherent dynamics and structural variability of biological complexes coupled with the large number of experimental images [...] Read more.
Single particle cryo-electron microscopy (cryo-EM) has emerged as the prevailing method for near-atomic structure determination, shedding light on the important molecular mechanisms of biological macromolecules. However, the inherent dynamics and structural variability of biological complexes coupled with the large number of experimental images generated by a cryo-EM experiment make data processing nontrivial. In particular, ab initio reconstruction and atomic model building remain major bottlenecks that demand substantial computational resources and manual intervention. Approaches utilizing recent innovations in artificial intelligence (AI) technology, particularly deep learning, have the potential to overcome the limitations that cannot be adequately addressed by traditional image processing approaches. Here, we review newly proposed AI-based methods for ab initio volume generation, heterogeneous 3D reconstruction, and atomic model building. We highlight the advancements made by the implementation of AI methods, as well as discuss remaining limitations and areas for future development. Full article
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19 pages, 11308 KiB  
Article
A High-Precision Quartz Resonant Ultra-High Pressure Sensor with Integrated Pressure Conversion Structure
by Quanwei Zhang, Cun Li, Huafeng Li, Yan Liu, Jue Wang, Xiaolong Wang, Yuan Wang, Fabin Cheng, Haijun Han and Peng Zhang
Micromachines 2023, 14(9), 1657; https://doi.org/10.3390/mi14091657 - 25 Aug 2023
Cited by 2 | Viewed by 1298
Abstract
A quartz resonant pressure sensor is proposed for high-precision measurement of ultra-high pressure. The resonant unit realizes a push–pull differential layout, which restrains the common-mode interference factor, and the resonator is only subject to axial force. The pressure conversion unit is made in [...] Read more.
A quartz resonant pressure sensor is proposed for high-precision measurement of ultra-high pressure. The resonant unit realizes a push–pull differential layout, which restrains the common-mode interference factor, and the resonator is only subject to axial force. The pressure conversion unit is made in an integrated manner, avoiding output drift problems caused by residual stress and small gaps during assembly, welding, and other processes in sensor preparation. Theoretical and simulation analysis was conducted on the overall design scheme of the sensor in this paper, verifying the feasibility. Sensor prototypes were created and performance experiments were conducted. The experimental results show that the sensitivity of the ultra-high pressure sensor is 46.32 Hz/MPa at room temperature within the pressure range of 120 MPa, and the comprehensive accuracy is 0.0266%. The comprehensive accuracy of the sensor is better than 0.0288% FS in the full temperature range environment. This proves that the sensor scheme is suitable for high-precision and high-stability detection of ultra-high pressure, providing new solutions in special pressure measurement fields such as deep-sea and oil exploration. Full article
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35 pages, 3159 KiB  
Review
Flexible and Stretchable Pressure Sensors: From Basic Principles to State-of-the-Art Applications
by Thara Seesaard and Chatchawal Wongchoosuk
Micromachines 2023, 14(8), 1638; https://doi.org/10.3390/mi14081638 - 20 Aug 2023
Cited by 10 | Viewed by 5784
Abstract
Flexible and stretchable electronics have emerged as highly promising technologies for the next generation of electronic devices. These advancements offer numerous advantages, such as flexibility, biocompatibility, bio-integrated circuits, and light weight, enabling new possibilities in diverse applications, including e-textiles, smart lenses, healthcare technologies, [...] Read more.
Flexible and stretchable electronics have emerged as highly promising technologies for the next generation of electronic devices. These advancements offer numerous advantages, such as flexibility, biocompatibility, bio-integrated circuits, and light weight, enabling new possibilities in diverse applications, including e-textiles, smart lenses, healthcare technologies, smart manufacturing, consumer electronics, and smart wearable devices. In recent years, significant attention has been devoted to flexible and stretchable pressure sensors due to their potential integration with medical and healthcare devices for monitoring human activity and biological signals, such as heartbeat, respiratory rate, blood pressure, blood oxygen saturation, and muscle activity. This review comprehensively covers all aspects of recent developments in flexible and stretchable pressure sensors. It encompasses fundamental principles, force/pressure-sensitive materials, fabrication techniques for low-cost and high-performance pressure sensors, investigations of sensing mechanisms (piezoresistivity, capacitance, piezoelectricity), and state-of-the-art applications. Full article
(This article belongs to the Special Issue Feature Reviews in Micromachines 2023)
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15 pages, 2915 KiB  
Article
Simultaneous Hydrostatic and Compressive Loading System for Mimicking the Mechanical Environment of Living Cartilage Tissue
by Minki Chang, Yosuke Takahashi, Kyosuke Miyahira, Yuma Omuro, Kevin Montagne, Ryusei Yamada, Junki Gondo, Yu Kambe, Masashi Yasuno, Noriyasu Masumoto, Takashi Ushida and Katsuko S. Furukawa
Micromachines 2023, 14(8), 1632; https://doi.org/10.3390/mi14081632 - 18 Aug 2023
Viewed by 871
Abstract
In vivo, articular cartilage tissue is surrounded by a cartilage membrane, and hydrostatic pressure (HP) and compressive strain increase simultaneously with the compressive stress. However, it has been impossible to investigate the effects of simultaneous loading in vitro. In this study, a bioreactor [...] Read more.
In vivo, articular cartilage tissue is surrounded by a cartilage membrane, and hydrostatic pressure (HP) and compressive strain increase simultaneously with the compressive stress. However, it has been impossible to investigate the effects of simultaneous loading in vitro. In this study, a bioreactor capable of applying compressive stress under HP was developed to reproduce ex vivo the same physical loading environment found in cartilage. First, a HP stimulation unit was constructed to apply a cyclic HP pressure-resistant chamber by controlling a pump and valve. A compression-loading mechanism that can apply compressive stress using an electromagnetic force was implemented in the chamber. The synchronization between the compression and HP units was evaluated, and the stimulation parameters were quantitatively evaluated. Physiological HP and compressive strain were applied to the chondrocytes encapsulated in alginate and gelatin gels after applying high HP at 25 MPa, which induced damage to the chondrocytes. It was found that compressive stimulation increased the expression of genes related to osteoarthritis. Furthermore, the simultaneous application of compressive strain and HP, which is similar to the physiological environment in cartilage, had an inhibitory effect on the expression of genes related to osteoarthritis. HP alone also suppressed the expression of osteoarthritis-related genes. Therefore, the simultaneous hydrostatic and compressive stress-loading device developed to simulate the mechanical environment in vivo may be an important tool for elucidating the mechanisms of disease onset and homeostasis in cartilage. Full article
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18 pages, 15136 KiB  
Article
Biocompatible High-Resolution 3D-Printed Microfluidic Devices: Integrated Cell Chemotaxis Demonstration
by Mawla Boaks, Connor Roper, Matthew Viglione, Kent Hooper, Adam T. Woolley, Kenneth A. Christensen and Gregory P. Nordin
Micromachines 2023, 14(8), 1589; https://doi.org/10.3390/mi14081589 - 12 Aug 2023
Cited by 4 | Viewed by 1423
Abstract
We demonstrate a method to effectively 3D print microfluidic devices with high-resolution features using a biocompatible resin based on avobenzone as the UV absorber. Our method relies on spectrally shaping the 3D printer source spectrum so that it is fully overlapped by avobenzone’s [...] Read more.
We demonstrate a method to effectively 3D print microfluidic devices with high-resolution features using a biocompatible resin based on avobenzone as the UV absorber. Our method relies on spectrally shaping the 3D printer source spectrum so that it is fully overlapped by avobenzone’s absorption spectrum. Complete overlap is essential to effectively limit the optical penetration depth, which is required to achieve high out-of-plane resolution. We demonstrate the high resolution in practice by 3D printing 15 μm square pillars in a microfluidic chamber, where the pillars are separated by 7.7 μm and are printed with 5 μm layers. Furthermore, we show reliable membrane valves and pumps using the biocompatible resin. Valves are tested to 1,000,000 actuations with no observable degradation in performance. Finally, we create a concentration gradient generation (CG) component and utilize it in two device designs for cell chemotaxis studies. The first design relies on an external dual syringe pump to generate source and sink flows to supply the CG channel, while the second is a complete integrated device incorporating on-chip pumps, valves, and reservoirs. Both device types are seeded with adherent cells that are subjected to a chemoattractant CG, and both show clear evidence of chemotactic cellular migration. Moreover, the integrated device demonstrates cellular migration comparable to the external syringe pump device. This demonstration illustrates the effectiveness of our integrated chemotactic assay approach and high-resolution biocompatible resin 3D printing fabrication process. In addition, our 3D printing process has been tuned for rapid fabrication, as printing times for the two device designs are, respectively, 8 and 15 min. Full article
(This article belongs to the Special Issue 3D Printing of MEMS Technology, 3rd Edition)
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10 pages, 2367 KiB  
Article
Double-Glued Multi-Focal Bionic Compound Eye Camera
by Xin Feng, Xiao Lv, Junyu Dong, Yongshun Liu, Fengfeng Shu and Yihui Wu
Micromachines 2023, 14(8), 1548; https://doi.org/10.3390/mi14081548 - 31 Jul 2023
Viewed by 1001
Abstract
Compound eye cameras are a vital component of bionics. Compound eye lenses are currently used in light field cameras, monitoring imaging, medical endoscopes, and other fields. However, the resolution of the compound eye lens is still low at the moment, which has an [...] Read more.
Compound eye cameras are a vital component of bionics. Compound eye lenses are currently used in light field cameras, monitoring imaging, medical endoscopes, and other fields. However, the resolution of the compound eye lens is still low at the moment, which has an impact on the application scene. Photolithography and negative pressure molding were used to create a double-glued multi-focal bionic compound eye camera in this study. The compound eye camera has 83 microlenses, with ommatidium diameters ranging from 400 μm to 660 μm, and a 92.3 degree field-of-view angle. The double-gluing structure significantly improves the optical performance of the compound eye lens, and the spatial resolution of the ommatidium is 57.00 lp mm−1. Additionally, the measurement of speed is investigated. This double-glue compound eye camera has numerous potential applications in the military, machine vision, and other fields. Full article
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42 pages, 10600 KiB  
Review
A Comprehensive Review of Surface Acoustic Wave-Enabled Acoustic Droplet Ejection Technology and Its Applications
by Jia Ning, Yulin Lei, Hong Hu and Chenhui Gai
Micromachines 2023, 14(8), 1543; https://doi.org/10.3390/mi14081543 - 31 Jul 2023
Cited by 3 | Viewed by 2115
Abstract
This review focuses on the development of surface acoustic wave-enabled acoustic drop ejection (SAW-ADE) technology, which utilizes surface acoustic waves to eject droplets from liquids without touching the sample. The technology offers advantages such as high throughput, high precision, non-contact, and integration with [...] Read more.
This review focuses on the development of surface acoustic wave-enabled acoustic drop ejection (SAW-ADE) technology, which utilizes surface acoustic waves to eject droplets from liquids without touching the sample. The technology offers advantages such as high throughput, high precision, non-contact, and integration with automated systems while saving samples and reagents. The article first provides an overview of the SAW-ADE technology, including its basic theory, simulation verification, and comparison with other types of acoustic drop ejection technology. The influencing factors of SAW-ADE technology are classified into four categories: fluid properties, device configuration, presence of channels or chambers, and driving signals. The influencing factors discussed in detail from various aspects, such as the volume, viscosity, and surface tension of the liquid; the type of substrate material, interdigital transducers, and the driving waveform; sessile droplets and fluid in channels/chambers; and the power, frequency, and modulation of the input signal. The ejection performance of droplets is influenced by various factors, and their optimization can be achieved by taking into account all of the above factors and designing appropriate configurations. Additionally, the article briefly introduces the application scenarios of SAW-ADE technology in bioprinters and chemical analyses and provides prospects for future development. The article contributes to the field of microfluidics and lab-on-a-chip technology and may help researchers to design and optimize SAW-ADE systems for specific applications. Full article
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10 pages, 9365 KiB  
Article
Non-Buffer Epi-AlGaN/GaN on SiC for High-Performance Depletion-Mode MIS-HEMTs Fabrication
by Penghao Zhang, Luyu Wang, Kaiyue Zhu, Qiang Wang, Maolin Pan, Ziqiang Huang, Yannan Yang, Xinling Xie, Hai Huang, Xin Hu, Saisheng Xu, Min Xu, Chen Wang, Chunlei Wu and David Wei Zhang
Micromachines 2023, 14(8), 1523; https://doi.org/10.3390/mi14081523 - 29 Jul 2023
Viewed by 984
Abstract
A systematic study of epi-AlGaN/GaN on a SiC substrate was conducted through a comprehensive analysis of material properties and device performance. In this novel epitaxial design, an AlGaN/GaN channel layer was grown directly on the AlN nucleation layer, without the conventional doped thick [...] Read more.
A systematic study of epi-AlGaN/GaN on a SiC substrate was conducted through a comprehensive analysis of material properties and device performance. In this novel epitaxial design, an AlGaN/GaN channel layer was grown directly on the AlN nucleation layer, without the conventional doped thick buffer layer. Compared to the conventional epi-structures on the SiC and Si substrates, the non-buffer epi-AlGaN/GaN structure had a better crystalline quality and surface morphology, with reliable control of growth stress. Hall measurements showed that the novel structure exhibited comparable transport properties to the conventional epi-structure on the SiC substrate, regardless of the buffer layer. Furthermore, almost unchanged carrier distribution from room temperature to 150 °C indicated excellent two-dimensional electron gas (2DEG) confinement due to the pulling effect of the conduction band from the nucleation layer as a back-barrier. High-performance depletion-mode MIS-HEMTs were demonstrated with on-resistance of 5.84 Ω·mm and an output current of 1002 mA/mm. The dynamic characteristics showed a much smaller decrease in the saturation current (only ~7%), with a quiescent drain bias of 40 V, which was strong evidence of less electron trapping owing to the high-quality non-buffer AlGaN/GaN epitaxial growth. Full article
(This article belongs to the Special Issue Advanced Micro- and Nano-Manufacturing Technologies)
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13 pages, 9055 KiB  
Article
Investigation on Wire Electrochemical Discharge Micro-Machining
by Weijing Kong, Ziyu Liu, Rudong Zhang and Yongbin Zeng
Micromachines 2023, 14(8), 1505; https://doi.org/10.3390/mi14081505 - 27 Jul 2023
Cited by 1 | Viewed by 1059
Abstract
With the development of MEMS, the machining demand and requirements for difficult-to-machine metal micro parts are getting higher. Microelectric discharge machining is an effective method to process difficult-to-machine metals. However, the recast layer caused by high temperatures in microelectric discharge machining affects the [...] Read more.
With the development of MEMS, the machining demand and requirements for difficult-to-machine metal micro parts are getting higher. Microelectric discharge machining is an effective method to process difficult-to-machine metals. However, the recast layer caused by high temperatures in microelectric discharge machining affects the properties of machined materials. Here, we propose the wire electrochemical discharge micro-machining (WECDMM) and develop a new electrolyte system, which removes the recast layer. In this study, the mechanism of WECDMM was elucidated. The electrolyte was optimized through a comparison experiment, and NaNO3-glycol solution was determined as the best electrolyte. The influences of key process parameters including the conductivity of the electrolyte, pulse voltage, pulse-on time and wire feed rate were analyzed on the slit width, standard deviation, the radius of fillet at the entrance of the slit and roughness. Typical microstructures were machined, which verified the machining ability of WECDMM. Full article
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16 pages, 13506 KiB  
Article
Experimental Investigations upon Ultrasound Influence on Calefaction of AdBlue in Selective Catalytic Reduction Systems (SCR)
by Claudiu Marian Picus, Ioan Mihai and Cornel Suciu
Micromachines 2023, 14(8), 1488; https://doi.org/10.3390/mi14081488 - 25 Jul 2023
Viewed by 805
Abstract
The present paper intends to provide an analysis of how the process of calefaction occurs in a selective catalytic reduction (SCR) system and the mechanisms by which the deposition of AdBlue crystals on a hot surface evolve. Experimentally, two aluminium samples heated to [...] Read more.
The present paper intends to provide an analysis of how the process of calefaction occurs in a selective catalytic reduction (SCR) system and the mechanisms by which the deposition of AdBlue crystals on a hot surface evolve. Experimentally, two aluminium samples heated to 200 °C were used, over which AdBlue droplets with different atomisation rates were dropped, maintaining the same dynamic flow parameters, in order to observe the influence of temperature effects on the degree of deposition of crystallised sediment on the surface. The authors proposed the use of calefaction in an ultrasonic environment to prevent deposition and to increase droplet fragmentation by a break-up process. To prove the performance of this method one sample was subjected to a normal flow regime while a second sample was exposed to ultrasound. Both samples were assembled on a magneto-strictive concentrator operating at a frequency of 20 kHz. The obtained results indicated that the sample exposed to ultrasound demonstrated lower urea crystallisation compared to the sample that was not exposed to this treatment. Thus, it can be seen that the proposed method of injecting AdBlue into an ultrasonic zone gives the desired results. Full article
(This article belongs to the Special Issue Heat Transfer and Fluid Flow in Microstructures)
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19 pages, 3113 KiB  
Review
MXene-Embedded Electrospun Polymeric Nanofibers for Biomedical Applications: Recent Advances
by Bishweshwar Pant, Mira Park and Allison A. Kim
Micromachines 2023, 14(7), 1477; https://doi.org/10.3390/mi14071477 - 23 Jul 2023
Cited by 1 | Viewed by 2130
Abstract
Recently MXenes has gained immense attention as a new and exciting class of two-dimensional material. Due to their unique layered microstructure, the presence of various functional groups at the surface, earth abundance, and attractive electrical, optical, and thermal properties, MXenes are considered promising [...] Read more.
Recently MXenes has gained immense attention as a new and exciting class of two-dimensional material. Due to their unique layered microstructure, the presence of various functional groups at the surface, earth abundance, and attractive electrical, optical, and thermal properties, MXenes are considered promising candidates for various applications such as energy, environmental, and biomedical. The ease of dispersibility and metallic conductivity of MXene render them promising candidates for use as fillers in polymer nanocomposites. MXene–polymer nanocomposites simultaneously benefit from the attractive properties of MXenes and the flexibility and facile processability of polymers. However, the potentiality of MXene to modify the electrospun nanofibers has been less studied. Understanding the interactions between polymeric nanofibers and MXenes is important to widen their role in biomedical applications. This review explores diverse methods of MXene synthesis, discusses our current knowledge of the various biological characteristics of MXene, and the synthesis of MXene incorporated polymeric nanofibers and their utilization in biomedical applications. The information discussed in this review serves to guide the future development and application of MXene–polymer nanofibers in biomedical fields. Full article
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12 pages, 3389 KiB  
Article
Silicon Micromachined TSVs for Backside Interconnection of Ultra-Small Pressure Sensors
by Weiwen Feng, Peng Li, Haozhi Zhang, Ke Sun, Wei Li, Jiachou Wang, Heng Yang and Xinxin Li
Micromachines 2023, 14(7), 1448; https://doi.org/10.3390/mi14071448 - 19 Jul 2023
Cited by 3 | Viewed by 1197
Abstract
This paper presents an ultra-small absolute pressure sensor with a silicon-micromachined TSV backside interconnection for high-performance, high spatial resolution contact pressure sensing, including flexible-substrate applications. By exploiting silicon-micromachined TSVs that are compatibly fabricated with the pressure sensor, the sensing signals are emitted from [...] Read more.
This paper presents an ultra-small absolute pressure sensor with a silicon-micromachined TSV backside interconnection for high-performance, high spatial resolution contact pressure sensing, including flexible-substrate applications. By exploiting silicon-micromachined TSVs that are compatibly fabricated with the pressure sensor, the sensing signals are emitted from the chip backside, thereby eliminating the fragile leads on the front-side. Such a design achieves a flat and fully passivated top surface to protect the sensor from mechanical damage, for reliable direct-contact pressure sensing. A single-crystal silicon beam–island structure is designed to reduce the deflection of the pressure-sensing diaphragm and improve output linearity. Using our group-developed microholes interetch and sealing (MIS) micromachining technique, we fabricated ultra-small piezoresistive pressure sensors with the chip size as small as 0.4 mm × 0.6 mm, in which the polysilicon-micromachined TSVs transfer the signal interconnection from the front-side to the backside of the wafer, and the sensor chips can be densely packaged on the flexible substrate via the TSVs. The ultra-small pressure sensor has high sensitivity of 0.84 mV/kPa under 3.3 V of supply voltage and low nonlinearity of ±0.09% full scale (FS) in the measurement range of 120 kPa. The proposed pressure sensors with backside-interconnection TSVs hold promise for tactile sensing applications, including flexible sensing of wearable wristwatches. Full article
(This article belongs to the Section A:Physics)
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14 pages, 2985 KiB  
Article
High-Performance Low-Voltage Transparent Metal-Semiconductor-Metal Ultraviolet Photodetectors Based on Ultrathin Gold Asymmetric Interdigitated Electrodes
by Jianfeng Huang, Liu Yang and Sailing He
Micromachines 2023, 14(7), 1447; https://doi.org/10.3390/mi14071447 - 19 Jul 2023
Cited by 2 | Viewed by 1110
Abstract
A high-performance, low-voltage, transparent, metal-semiconductor-metal ultraviolet (UV) photodetector (PD) is proposed and experimentally demonstrated, based on gold (Au) asymmetric interdigitated (aIDT) electrodes with thicknesses well below 10 nm. A 7-nm-thick Au film, with a visible transmittance of 80.4% and a sheet resistance of [...] Read more.
A high-performance, low-voltage, transparent, metal-semiconductor-metal ultraviolet (UV) photodetector (PD) is proposed and experimentally demonstrated, based on gold (Au) asymmetric interdigitated (aIDT) electrodes with thicknesses well below 10 nm. A 7-nm-thick Au film, with a visible transmittance of 80.4% and a sheet resistance of 11.55 Ω/sq, is patterned into aIDT electrodes on a ZnO active layer, whose average visible transmittance is up to 74.3%. Meshing the pads further improves the overall transmittance of the device. Among all fabricated devices, the PD with the aIDT finger width ratio of 1:4 performs the best. Very low dark currents are achieved at 0, 0.5 and 1 V, allowing for high responsivities and specific detectivities to the UV light. It is also a fast device, especially under the biases of 0.5 and 1 V. The comprehensive performances are comparable and even superior to those of the reported devices. The asymmetric Schottky junctions induced by the aIDT electrodes under UV illumination are the main mechanism for the low-voltage operation of our transparent PD, which is promising to be applied widely. Full article
(This article belongs to the Special Issue Transparent Flexible Optoelectronic Devices)
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12 pages, 13543 KiB  
Article
A Magnetic Millirobot Walks on Slippery Biological Surfaces for Targeted Cargo Delivery
by Moonkwang Jeong, Xiangzhou Tan, Felix Fischer and Tian Qiu
Micromachines 2023, 14(7), 1439; https://doi.org/10.3390/mi14071439 - 18 Jul 2023
Cited by 3 | Viewed by 1461
Abstract
Small-scale robots hold great potential for targeted cargo delivery in minimally invasive medicine. However, current robots often face challenges in locomoting efficiently on slippery biological tissue surfaces, especially when loaded with heavy cargo. Here, we report a magnetic millirobot that can walk on [...] Read more.
Small-scale robots hold great potential for targeted cargo delivery in minimally invasive medicine. However, current robots often face challenges in locomoting efficiently on slippery biological tissue surfaces, especially when loaded with heavy cargo. Here, we report a magnetic millirobot that can walk on rough and slippery biological tissues by anchoring itself on the soft tissue surface alternatingly with two feet and reciprocally rotating the body to move forward. We experimentally studied the locomotion, validated it with numerical simulations, and optimized the actuation parameters to fit various terrains and loading conditions. Furthermore, we developed a permanent magnet set-up to enable wireless actuation within a human-scale volume that allows precise control of the millirobot to follow complex trajectories, climb vertical walls, and carry cargo up to four times its own weight. Upon reaching the target location, it performs a deployment sequence to release the liquid drug into tissues. The robust gait of our millirobot on rough biological terrains, combined with its heavy load capacity, makes it a versatile and effective miniaturized vehicle for targeted cargo delivery. Full article
(This article belongs to the Special Issue Recent Advances in Microrobotics)
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11 pages, 3940 KiB  
Article
Red Blood Cell Partitioning Using a Microfluidic Channel with Ladder Structure
by Toru Hyakutake, Yuya Tsutsumi, Yohei Miyoshi, Manabu Yasui, Tomoki Mizuno and Mizuki Tateno
Micromachines 2023, 14(7), 1421; https://doi.org/10.3390/mi14071421 - 14 Jul 2023
Viewed by 868
Abstract
This study investigated the partitioning characteristics of red blood cells (RBCs) within capillaries, with a specific focus on ladder structures observed near the end of the capillaries. In vitro experiments were conducted using microfluidic channels with a ladder structure model comprising six bifurcating [...] Read more.
This study investigated the partitioning characteristics of red blood cells (RBCs) within capillaries, with a specific focus on ladder structures observed near the end of the capillaries. In vitro experiments were conducted using microfluidic channels with a ladder structure model comprising six bifurcating channels that exhibited an anti-parallel flow configuration. The effects of various factors, such as the parent channel width, distance between branches, and hematocrit, on RBC partitioning in bifurcating channels were evaluated. A decrease in the parent channel width resulted in an increase in the heterogeneity in the hematocrit distribution and a bias in the fractional RBC flux. Additionally, variations in the distance between branches affected the RBC distribution, with smaller distances resulting in greater heterogeneity. The bias of the RBC distribution in the microchannel cross section had a major effect on the RBC partitioning characteristics. The influence of hematocrit variations on the RBC distribution was also investigated, with lower hematocrit values leading to a more pronounced bias in the RBC distribution. Overall, this study provides valuable insights into RBC distribution characteristics in capillary networks, contributing to our understanding of the physiological mechanisms of RBC phase separation in the microcirculatory system. These findings have implications for predicting oxygen heterogeneity in tissues and could aid in the study of diseases associated with impaired microcirculation. Full article
(This article belongs to the Special Issue Microfluidic Device Fabrication and Cell Manipulation)
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16 pages, 6623 KiB  
Article
Two−Dimensional Planar Penta−NiPN with Ultrahigh Carrier Mobility and Its Potential Application in NO and NO2 Gas Sensing
by Hao Wang, Gang Li, Jun-Hui Yuan, Jiafu Wang, Pan Zhang and Yahui Shan
Micromachines 2023, 14(7), 1407; https://doi.org/10.3390/mi14071407 - 12 Jul 2023
Viewed by 1078
Abstract
Two−dimensional (2D) materials with novel structures and electronic properties are promising candidates for the next generation of micro− and nano−electronic devices. Herein, inspired by the recent experimental synthesis of penta−NiN2 (ACS Nano, 2021, 15, 13539–13546), we propose for the first [...] Read more.
Two−dimensional (2D) materials with novel structures and electronic properties are promising candidates for the next generation of micro− and nano−electronic devices. Herein, inspired by the recent experimental synthesis of penta−NiN2 (ACS Nano, 2021, 15, 13539–13546), we propose for the first time a novel ternary penta−NiPN monolayer with high stability by partial element substitution. Our predicted penta−NiPN monolayer is a quasi−direct bandgap (1.237 eV) semiconductor with ultrahigh carrier mobilities (103–105 cm2V−1s−1). Furthermore, we systematically studied the adsorption properties of common gas molecules (CO, CO2, CH4, H2, H2O, H2S, N2, NO, NO2, NH3, and SO2) on the penta−NiPN monolayer and its effects on electronic properties. According to the energetic, geometric, and electronic analyses, the penta−NiPN monolayer is predicted to be a promising candidate for NO and NO2 molecules. The excellent electronic properties of and the unique selectivity of the penta−NiPN monolayer for NO and NO2 adsorption suggest that it has high potential in advanced electronics and gas sensing applications. Full article
(This article belongs to the Special Issue Recent Progress of Lab-on-a-Chip Assays)
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16 pages, 6127 KiB  
Article
Ultra-Wideband and Narrowband Switchable, Bi-Functional Metamaterial Absorber Based on Vanadium Dioxide
by Xiaoyan Wang, Yanfei Liu, Yilin Jia, Ningning Su and Qiannan Wu
Micromachines 2023, 14(7), 1381; https://doi.org/10.3390/mi14071381 - 6 Jul 2023
Cited by 2 | Viewed by 1169
Abstract
A switchable ultra-wideband THz absorber based on vanadium dioxide was proposed, which consists of a lowermost gold layer, a PMI dielectric layer, and an insulating and surface vanadium dioxide layer. Based on the phase transition properties of vanadium dioxide, switching performance between ultra-broadband [...] Read more.
A switchable ultra-wideband THz absorber based on vanadium dioxide was proposed, which consists of a lowermost gold layer, a PMI dielectric layer, and an insulating and surface vanadium dioxide layer. Based on the phase transition properties of vanadium dioxide, switching performance between ultra-broadband and narrowband can achieve a near-perfect absorption. The constructed model was simulated and analyzed using finite element analysis. Simulations show that the absorption frequency of vanadium dioxide above 90% is between 3.8 THz and 15.6 THz when the vanadium dioxide is in the metallic state. The broadband absorber has an absorption bandwidth of 11.8 THz, is insensitive to TE and TM polarization, and has universal incidence angle insensitivity. When vanadium dioxide is in the insulating state, the narrowband absorber has a Q value as high as 1111 at a frequency of 13.89 THz when the absorption is more excellent than 99%. The absorber proposed in this paper has favorable symmetry properties, excellent TE and TM wave insensitivity, overall incidence angle stability, and the advantages of its small size, ultra-widebands and narrowbands, and elevated Q values. The designed absorber has promising applications in multifunctional devices, electromagnetic cloaking, and optoelectronic switches. Full article
(This article belongs to the Special Issue Recent Advances in Electromagnetic Devices)
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14 pages, 3020 KiB  
Article
Screen Printed Particle-Based Microfluidics: Optimization and Exemplary Application for Heavy Metals Analysis
by Indrek Saar and Hanno Evard
Micromachines 2023, 14(7), 1369; https://doi.org/10.3390/mi14071369 - 4 Jul 2023
Viewed by 1039
Abstract
In this work, a screen-printing method was developed to create porous particle-based materials as layers with specifically designed shape to produce microfluidics systems. Among several tested binding agents, xanthan gum was found to be an excellent choice for a printing mixture thickener as [...] Read more.
In this work, a screen-printing method was developed to create porous particle-based materials as layers with specifically designed shape to produce microfluidics systems. Among several tested binding agents, xanthan gum was found to be an excellent choice for a printing mixture thickener as well as a durable binder for the resulting material. In addition to demonstrating control over the shape of the printed microfluidics chips, control over material thickness, wetting characteristics and general method accuracy were also investigated. The applicability of the introduced method was further demonstrated with a development of an exemplary microfluidics chip for quantitative detection of Fe (III), Ni (II), Cu (II), Cd (II), and Pb (II) from a mixed sample at millimolar levels. The novel approaches demonstrated in this article offer new perspective into creating multiplexed on-site chemical analysis tests. Full article
(This article belongs to the Special Issue Porous-Materials-Based Devices)
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17 pages, 10242 KiB  
Article
Improvement of the Airflow Energy Harvester Based on the New Diamagnetic Levitation Structure
by Long Zhang, Hang Shao, Jiaxiang Zhang, Deping Liu, Kean C. Aw and Yufeng Su
Micromachines 2023, 14(7), 1374; https://doi.org/10.3390/mi14071374 - 4 Jul 2023
Viewed by 921
Abstract
This paper presents an improved solution for the airflow energy harvester based on the push–pull diamagnetic levitation structure. A four-notch rotor is adopted to eliminate the offset of the floating rotor and substantially increase the energy conversion rate. The new rotor is a [...] Read more.
This paper presents an improved solution for the airflow energy harvester based on the push–pull diamagnetic levitation structure. A four-notch rotor is adopted to eliminate the offset of the floating rotor and substantially increase the energy conversion rate. The new rotor is a centrally symmetrical-shaped magnet, which ensures that it is not subjected to cyclically varying unbalanced radial forces, thus avoiding the rotor’s offset. Considering the output voltage and power of several types of rotors, the four-notch rotor was found to be optimal. Furthermore, with the four-notch rotor, the overall average increase in axial magnetic spring stiffness is 9.666% and the average increase in maximum monostable levitation space is 1.67%, but the horizontal recovery force is reduced by 3.97%. The experimental results show that at an airflow rate of 3000 sccm, the peak voltage and rotation speed of the four-notch rotor are 2.709 V and 21,367 rpm, respectively, which are 40.80% and 5.99% higher compared to the three-notch rotor. The experimental results were consistent with the analytical simulation. Based on the improvement, the energy conversion factor of the airflow energy harvester increased to 0.127 mV/rpm, the output power increased to 138.47 mW and the energy conversion rate increased to 58.14%, while the trend of the levitation characteristics also matched the simulation results. In summary, the solution proposed in this paper significantly improves the performance of the airflow energy harvester. Full article
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14 pages, 5466 KiB  
Article
Piezotronic and Piezo-Phototronic Effects-Enhanced Core–Shell Structure-Based Nanowire Field-Effect Transistors
by Xiang Liu, Fangpei Li, Wenbo Peng, Quanzhe Zhu, Yangshan Li, Guodong Zheng, Hongyang Tian and Yongning He
Micromachines 2023, 14(7), 1335; https://doi.org/10.3390/mi14071335 - 29 Jun 2023
Viewed by 928
Abstract
Piezotronic and piezo-phototronic effects have been extensively applied to modulate the performance of advanced electronics and optoelectronics. In this study, to systematically investigate the piezotronic and piezo-phototronic effects in field-effect transistors (FETs), a core–shell structure-based Si/ZnO nanowire heterojunction FET (HJFET) model was established [...] Read more.
Piezotronic and piezo-phototronic effects have been extensively applied to modulate the performance of advanced electronics and optoelectronics. In this study, to systematically investigate the piezotronic and piezo-phototronic effects in field-effect transistors (FETs), a core–shell structure-based Si/ZnO nanowire heterojunction FET (HJFET) model was established using the finite element method. We performed a sweep analysis of several parameters of the model. The results show that the channel current increases with the channel radial thickness and channel doping concentration, while it decreases with the channel length, gate doping concentration, and gate voltage. Under a tensile strain of 0.39‰, the saturation current change rate can reach 38%. Finally, another core–shell structure-based ZnO/Si nanowire HJFET model with the same parameters was established. The simulation results show that at a compressive strain of −0.39‰, the saturation current change rate is about 18%, which is smaller than that of the Si/ZnO case. Piezoelectric potential and photogenerated electromotive force jointly regulate the carrier distribution in the channel, change the width of the channel depletion layer and the channel conductivity, and thus regulate the channel current. The research results provide a certain degree of reference for the subsequent experimental design of Zn-based HJFETs and are applicable to other kinds of FETs. Full article
(This article belongs to the Special Issue Nanowires for Novel Technological Applications)
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19 pages, 11040 KiB  
Article
Design and Modeling of a Miniature Hydraulic Motor for Powering a Cutting Tool for Minimally Invasive Procedures
by Manjeera Vinnakota, Kishan Bellur, Sandra L. Starnes and Mark J. Schulz
Micromachines 2023, 14(7), 1338; https://doi.org/10.3390/mi14071338 - 29 Jun 2023
Cited by 1 | Viewed by 1344
Abstract
Miniaturization of multifunctional instruments is key to evolving less invasive medical procedures. The current work outlines steps towards developing a miniature motor to power a cutting tool of a millimeter-scale robot/device (target outside diameter ~2 mm) for minimally invasive procedures. Multiple motor concepts [...] Read more.
Miniaturization of multifunctional instruments is key to evolving less invasive medical procedures. The current work outlines steps towards developing a miniature motor to power a cutting tool of a millimeter-scale robot/device (target outside diameter ~2 mm) for minimally invasive procedures. Multiple motor concepts were explored and ranked using a Pugh matrix. The single-rotor hydraulic design was deemed most viable for prototyping and scale-down to the target size. Prototypes were manufactured to be progressively smaller using additive manufacturing. The smallest prototype fabricated was 2:1 scale of the desired final size with a 2 mm outside diameter (OD) rotor and a device OD of 4 mm. The scaled prototypes with an 8 mm rotor were lab tested and achieved average speeds of 5000–6000 RPM at a flowrate of 15–18 mL/s and 45 PSI water pressure. Ansys CFX was used as a design tool to explore the parameter space and 3D transient simulations were implemented using the immersed solid method. The predicted rotor RPM from the modeling matched the experimental values within 3% error. The model was then used to develop performance curves for the miniature hydraulic motor. In summary, the single-rotor hydraulic design shows promise for miniaturization to the target 2 mm size. Full article
(This article belongs to the Special Issue Women’s Special Issue Series: Micromachines 2023)
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13 pages, 1073 KiB  
Article
Ultra-Narrow Bandwidth Microwave Photonic Filter Implemented by Single Longitudinal Mode Parity Time Symmetry Brillouin Fiber Laser
by Jiaxin Hou, Yajun You, Yuan Liu, Kai Jiang, Xuefeng Han, Wenjun He, Wenping Geng, Yi Liu and Xiujian Chou
Micromachines 2023, 14(7), 1322; https://doi.org/10.3390/mi14071322 - 27 Jun 2023
Cited by 1 | Viewed by 1475
Abstract
In this paper, a novel microwave photonic filter (MPF) based on a single longitudinal mode Brillouin laser achieved by parity time (PT) symmetry mode selection is proposed, and its unparalleled ultra-narrow bandwidth as low as to sub-kHz together with simple and agile tuning [...] Read more.
In this paper, a novel microwave photonic filter (MPF) based on a single longitudinal mode Brillouin laser achieved by parity time (PT) symmetry mode selection is proposed, and its unparalleled ultra-narrow bandwidth as low as to sub-kHz together with simple and agile tuning performance is experimentally verified. The Brillouin fiber laser ring resonator is cascaded with a PT symmetric system to achieve this MPF. Wherein, the Brillouin laser resonator is excited by a 5 km single mode fiber to generate Brillouin gain, and the PT symmetric system is configured with Polarization Beam Splitter (PBS) and polarization controller (PC) to achieve PT symmetry. Thanks to the significant enhancement of the gain difference between the main mode and the edge mode when the polarization state PT symmetry system breaks, a single mode oscillating Brillouin laser is generated. Through the selective amplification of sideband modulated signals by ultra-narrow linewidth Brillouin single mode laser gain, the MPF with ultra-narrow single passband performance is obtained. By simply tuning the central wavelength of the stimulated Brillouin scattering (SBS) pumped laser to adjust the Brillouin oscillation frequency, the gain position of the Brillouin laser can be shifted, thereby achieving flexible tunability. The experimental results indicate that the MPF proposed in this paper achieves a single pass band narrow to 72 Hz and the side mode rejection ratio of more than 18 dB, with a center frequency tuning range of 0–20 GHz in the testing range of vector network analysis, which means that the MPF possesses ultra high spectral resolution and enormous potential application value in the domain of ultra fine microwave spectrum filtering such as radar imaging and electronic countermeasures. Full article
(This article belongs to the Special Issue Progress and Application of Ultra-Precision Laser Interferometry)
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11 pages, 3447 KiB  
Article
Multi-Layered Bipolar Ionic Diode Working in Broad Range Ion Concentration
by Jaehyun Kim, Cong Wang and Jungyul Park
Micromachines 2023, 14(7), 1311; https://doi.org/10.3390/mi14071311 - 26 Jun 2023
Cited by 1 | Viewed by 1500
Abstract
Ion current rectification (ICR) is the ratio of ion current by forward bias to backward bias and is a critical indicator of diode performance. In previous studies, there have been many attempts to improve the performance of this ICR, but there is the [...] Read more.
Ion current rectification (ICR) is the ratio of ion current by forward bias to backward bias and is a critical indicator of diode performance. In previous studies, there have been many attempts to improve the performance of this ICR, but there is the intrinsic problem for geometric changes that induce ionic rectification due to fabrication problems. Additionally, the high ICR could be achieved in the narrow salt concentration range only. Here, we propose a multi-layered bipolar ionic diode based on an asymmetric nanochannel network membrane (NCNM), which is realized by soft lithography and self-assembly of homogenous-sized nanoparticles. Owing to the freely changeable geometry based on soft lithography, the ICR performance can be explored according to the variation of microchannel shape. The presented diode with multi-layered configuration shows strong ICR performance, and in a broad range of salt concentrations (0.1 mM~100 mM), steady ICR performance. It is interesting to note that when each anion-selective (AS) and cation-selective (CS) NCNM volume was similar to each optimized volume in a single-layered device, the maximum ICR was obtained. Multi-physics simulation, which reveals greater ionic concentration at the bipolar diode junction under forward bias and less depletion under backward in comparison to the single-layer scenario, supports this tendency as well. Additionally, under different frequencies and salt concentrations, a large-area hysteresis loop emerges, which indicates fascinating potential for electroosmotic pumps, memristors, biosensors, etc. Full article
(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)
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17 pages, 7839 KiB  
Article
Research on Intelligent Wheelchair Attitude-Based Adjustment Method Based on Action Intention Recognition
by Jianwei Cui, Zizheng Huang, Xiang Li, Linwei Cui, Yucheng Shang and Liyan Tong
Micromachines 2023, 14(6), 1265; https://doi.org/10.3390/mi14061265 - 17 Jun 2023
Cited by 2 | Viewed by 1338
Abstract
At present, research on intelligent wheelchairs mostly focuses on motion control, while research on attitude-based adjustment is relatively insufficient. The existing methods for adjusting wheelchair posture generally lack collaborative control and good human–machine collaboration. This article proposes an intelligent wheelchair posture-adjustment method based [...] Read more.
At present, research on intelligent wheelchairs mostly focuses on motion control, while research on attitude-based adjustment is relatively insufficient. The existing methods for adjusting wheelchair posture generally lack collaborative control and good human–machine collaboration. This article proposes an intelligent wheelchair posture-adjustment method based on action intention recognition by studying the relationship between the force changes on the contact surface between the human body and the wheelchair and the action intention. This method is applied to a multi-part adjustable electric wheelchair, which is equipped with multiple force sensors to collect pressure information from various parts of the passenger’s body. The upper level of the system converts the pressure data into the form of a pressure distribution map, extracts the shape features using the VIT deep learning model, identifies and classifies them, and ultimately identifies the action intentions of the passengers. Based on different action intentions, the electric actuator is controlled to adjust the wheelchair posture. After testing, this method can effectively collect the body pressure data of passengers, with an accuracy of over 95% for the three common intentions of lying down, sitting up, and standing up. The wheelchair can adjust its posture based on the recognition results. By adjusting the wheelchair posture through this method, users do not need to wear additional equipment and are less affected by the external environment. The target function can be achieved with simple learning, which has good human–machine collaboration and can solve the problem of some people having difficulty adjusting the wheelchair posture independently during wheelchair use. Full article
(This article belongs to the Special Issue Assistive Robots)
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16 pages, 2250 KiB  
Review
How Practical Are Fiber Supercapacitors for Wearable Energy Storage Applications?
by Parya Teymoory, Jingzhou Zhao and Caiwei Shen
Micromachines 2023, 14(6), 1249; https://doi.org/10.3390/mi14061249 - 14 Jun 2023
Cited by 1 | Viewed by 1478
Abstract
Future wearable electronics and smart textiles face a major challenge in the development of energy storage devices that are high-performing while still being flexible, lightweight, and safe. Fiber supercapacitors are one of the most promising energy storage technologies for such applications due to [...] Read more.
Future wearable electronics and smart textiles face a major challenge in the development of energy storage devices that are high-performing while still being flexible, lightweight, and safe. Fiber supercapacitors are one of the most promising energy storage technologies for such applications due to their excellent electrochemical characteristics and mechanical flexibility. Over the past decade, researchers have put in tremendous effort and made significant progress on fiber supercapacitors. It is now the time to assess the outcomes to ensure that this kind of energy storage device will be practical for future wearable electronics and smart textiles. While the materials, fabrication methods, and energy storage performance of fiber supercapacitors have been summarized and evaluated in many previous publications, this review paper focuses on two practical questions: Are the reported devices providing sufficient energy and power densities to wearable electronics? Are the reported devices flexible and durable enough to be integrated into smart textiles? To answer the first question, we not only review the electrochemical performance of the reported fiber supercapacitors but also compare them to the power needs of a variety of commercial electronics. To answer the second question, we review the general approaches to assess the flexibility of wearable textiles and suggest standard methods to evaluate the mechanical flexibility and stability of fiber supercapacitors for future studies. Lastly, this article summarizes the challenges for the practical application of fiber supercapacitors and proposes possible solutions. Full article
(This article belongs to the Special Issue Micro Supercapacitors for Energy Storage and Power Management)
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12 pages, 2127 KiB  
Article
Integration of Microfluidic Chip and Probe with a Dual Pump System for Measurement of Single Cells Transient Response
by Xu Du, Shingo Kaneko, Hisataka Maruyama, Hirotaka Sugiura, Masaru Tsujii, Nobuyuki Uozumi and Fumihito Arai
Micromachines 2023, 14(6), 1210; https://doi.org/10.3390/mi14061210 - 7 Jun 2023
Cited by 4 | Viewed by 1564
Abstract
The integration of liquid exchange and microfluidic chips plays a critical role in the biomedical and biophysical fields as it enables the control of the extracellular environment and allows for the simultaneous stimulation and detection of single cells. In this study, we present [...] Read more.
The integration of liquid exchange and microfluidic chips plays a critical role in the biomedical and biophysical fields as it enables the control of the extracellular environment and allows for the simultaneous stimulation and detection of single cells. In this study, we present a novel approach for measuring the transient response of single cells using a system integrated with a microfluidic chip and a probe with a dual pump. The system was composed of a probe with a dual pump system, a microfluidic chip, optical tweezers, an external manipulator, an external piezo actuator, etc. Particularly, we incorporated the probe with the dual pump to allow for high-speed liquid change, and the localized flow control enabled a low disturbance contact force detection of single cells on the chip. Using this system, we measured the transient response of the cell swelling against the osmotic shock with a very fine time resolution. To demonstrate the concept, we first designed the double-barreled pipette, which was assembled with two piezo pumps to achieve a probe with the dual pump system, allowing for simultaneous liquid injection and suction. The microfluidic chip with on-chip probes was fabricated, and the integrated force sensor was calibrated. Second, we characterized the performance of the probe with the dual pump system, and the effect of the analysis position and area of the liquid exchange time was investigated. In addition, we optimized the applied injection voltage to achieve a complete concentration change, and the average liquid exchange time was achieved at approximately 3.33 ms. Finally, we demonstrated that the force sensor was only subjected to minor disturbances during the liquid exchange. This system was utilized to measure the deformation and the reactive force of Synechocystis sp. strain PCC 6803 in osmotic shock, with an average response time of approximately 16.33 ms. This system reveals the transient response of compressed single cells under millisecond osmotic shock which has the potential to characterize the accurate physiological function of ion channels. Full article
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26 pages, 7501 KiB  
Review
Revolutionizing Prosthetic Design with Auxetic Metamaterials and Structures: A Review of Mechanical Properties and Limitations
by Muhammad Faris Fardan, Bhre Wangsa Lenggana, U Ubaidillah, Seung-Bok Choi, Didik Djoko Susilo and Sohaib Zia Khan
Micromachines 2023, 14(6), 1165; https://doi.org/10.3390/mi14061165 - 31 May 2023
Cited by 3 | Viewed by 2439
Abstract
Prosthetics have come a long way since their inception, and recent advancements in materials science have enabled the development of prosthetic devices with improved functionality and comfort. One promising area of research is the use of auxetic metamaterials in prosthetics. Auxetic materials have [...] Read more.
Prosthetics have come a long way since their inception, and recent advancements in materials science have enabled the development of prosthetic devices with improved functionality and comfort. One promising area of research is the use of auxetic metamaterials in prosthetics. Auxetic materials have a negative Poisson’s ratio, which means that they expand laterally when stretched, unlike conventional materials, which contract laterally. This unique property allows for the creation of prosthetic devices that can better conform to the contours of the human body and provide a more natural feel. In this review article, we provide an overview of the current state of the art in the development of prosthetics using auxetic metamaterials. We discuss the mechanical properties of these materials, including their negative Poisson’s ratio and other properties that make them suitable for use in prosthetic devices. We also explore the limitations that currently exist in implementing these materials in prosthetic devices, including challenges in manufacturing and cost. Despite these challenges, the future prospects for the development of prosthetic devices using auxetic metamaterials are promising. Continued research and development in this field could lead to the creation of more comfortable, functional, and natural-feeling prosthetic devices. Overall, the use of auxetic metamaterials in prosthetics represents a promising area of research with the potential to improve the lives of millions of people around the world who rely on prosthetic devices. Full article
(This article belongs to the Special Issue Smart Material-Based Micromechatronics in Soft Robotics)
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