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Micromachines, Volume 13, Issue 7

2022 July - 179 articles

Cover Story: Silicon photonics has recently expanded its applications to the delivery of free-space emissions for the detection or manipulation of external objects. Notable examples include the optical phased array, which can steer a free-space beam to achieve solid-state LiDARs, free-space optical communication, quantum photonics, imaging systems, and optogenetic probes. In contrast to conventional bulk optics, silicon photonics miniaturizes an optical system into a photonic chip with many functional waveguiding components. By leveraging the CMOS process, silicon photonics enables high-volume production, scalability, reconfigurability, and parallelism. These unique advantages of silicon photonics will create new possibilities for next-generation free-space optical systems. View this paper
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Articles (179)

  • Article
  • Open Access
2,035 Views
11 Pages

An AlGaN/GaN Lateral Bidirectional Current-Regulating Diode with Two Symmetrical Hybrid Ohmic-Schottky Structures

  • Yijun Shi,
  • Zongqi Cai,
  • Yun Huang,
  • Zhiyuan He,
  • Yiqiang Chen,
  • Liye Cheng and
  • Guoguang Lu

21 July 2022

Bidirectional current-regulating ability is needed for AC light emitting diode (LED) drivers. In previous studies, various rectifier circuits have been used to provide constant bidirectional current. However, the usage of multiple electronic componen...

  • Article
  • Open Access
10 Citations
2,956 Views
13 Pages

21 July 2022

Tools with chamfered edges are often used in high speed machining of hard materials because they provide compelling cutting toughness and reduced tool wear. Chamfered tools are also responsible for the dead metal zone (DMZ). Through numerical simulat...

  • Article
  • Open Access
2 Citations
3,231 Views
7 Pages

Femtosecond Laser Direct Writing of Optical Overpass

  • Xiaochuan Ding,
  • Yao Zhao,
  • Ali Hassan,
  • Yunlu Sun,
  • Zhishan Hou,
  • Wei Xue and
  • Yu Cao

21 July 2022

With the rapid increase in information density, problems such as signal crosstalk and crossover restrict the further expansion of chip integration levels and packaging density. Based on this, a novel waveguide structure—photonic jumper wire&mda...

  • Article
  • Open Access
13 Citations
8,202 Views
11 Pages

Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics

  • Desheng Zeng,
  • Qiang Liu,
  • Chenyang Mei,
  • Hongwei Li,
  • Qingzhong Huang and
  • Xinliang Zhang

21 July 2022

A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wid...

  • Article
  • Open Access
2 Citations
2,230 Views
20 Pages

Cooperativity Model for Improving the Walking-Assistance Efficiency of the Exoskeleton

  • Jianfeng Ma,
  • Decheng Sun,
  • Yongqing Ding,
  • Daihe Luo and
  • Xiao Chen

21 July 2022

(1) Background: To enhance the walking-assistance efficiencies of exoskeletons, this paper proposed the biomechanical-based cooperativity model based on a passive exoskeleton prototype to fill the technical gap in exoskeleton design regarding the tor...

  • Article
  • Open Access
15 Citations
4,154 Views
14 Pages

A Direct-Reading MEMS Conductivity Sensor with a Parallel-Symmetric Four-Electrode Configuration

  • Zhiwei Liao,
  • Junmin Jing,
  • Rui Gao,
  • Yuzhen Guo,
  • Bin Yao,
  • Huiyu Zhang,
  • Zhou Zhao,
  • Wenjun Zhang,
  • Yonghua Wang and
  • Chenyang Xue
  • + 1 author

21 July 2022

This work proposes a design for a direct-reading conductivity sensor with a parallel symmetrical four-electrode structure, which integrates a silicon-based platinum thin-film strip electrode and a serpentine temperature compensation electrode. The op...

  • Article
  • Open Access
9 Citations
3,328 Views
12 Pages

21 July 2022

Bionic electronic skin is a system that simulates human skin and has multiple perceptions. For pressure sensors, high measurement accuracy and wide measurement range restrict each other, and it is difficult to achieve high measurement accuracy and wi...

  • Article
  • Open Access
7 Citations
3,635 Views
24 Pages

20 July 2022

Based on the anti-parallelogram mechanism, an approximate cylindrical rolling joint is proposed to develop a novel cable-driven snake-arm robot with multiple degrees of freedom (DOF). Furthermore, the kinematics of the cable-driven snake-arm robot ar...

  • Review
  • Open Access
37 Citations
5,971 Views
19 Pages

20 July 2022

Along with deep scaling transistors and complex electronics information exchange networks, very-large-scale-integrated (VLSI) circuits require high performance and ultra-low power consumption. In order to meet the demand of data-abundant workloads an...

  • Article
  • Open Access
16 Citations
5,493 Views
14 Pages

Fabrication and Electrical Characterization of High Aspect Ratio Through-Silicon Vias with Polyimide Liner for 3D Integration

  • Xuyan Chen,
  • Zhiming Chen,
  • Lei Xiao,
  • Yigang Hao,
  • Han Wang,
  • Yingtao Ding and
  • Ziyue Zhang

20 July 2022

High aspect ratio (HAR) through-silicon vias (TSVs) are in urgent need to achieve smaller keep-out zones (KOZs) and higher integration density for the miniaturization of high-performance three-dimensional (3D) integration of integrated circuits (IC),...

  • Article
  • Open Access
9 Citations
4,194 Views
14 Pages

Droplet Microfluidic Device for Chemoenzymatic Sensing

  • Anton S. Yakimov,
  • Ivan A. Denisov,
  • Anton S. Bukatin,
  • Kirill A. Lukyanenko,
  • Kirill I. Belousov,
  • Igor V. Kukhtevich,
  • Elena N. Esimbekova,
  • Anatoly A. Evstrapov and
  • Peter I. Belobrov

20 July 2022

The rapid detection of pollutants in water can be performed with enzymatic probes, the catalytic light-emitting activity of which decreases in the presence of many types of pollutants. Herein, we present a microfluidic system for continuous chemoenzy...

  • Feature Paper
  • Article
  • Open Access
13 Citations
3,755 Views
10 Pages

Toward Higher Integration Density in Femtosecond-Laser-Written Programmable Photonic Circuits

  • Riccardo Albiero,
  • Ciro Pentangelo,
  • Marco Gardina,
  • Simone Atzeni,
  • Francesco Ceccarelli and
  • Roberto Osellame

19 July 2022

Programmability in femtosecond-laser-written integrated circuits is commonly achieved with the implementation of thermal phase shifters. Recent work has shown how such phase shifters display significantly reduced power dissipation and thermal crossta...

  • Feature Paper
  • Communication
  • Open Access
3 Citations
2,400 Views
9 Pages

Enzymatic and Cellular Degradation of Carbon-Based Biconcave Nanodisks

  • Zhiyong Wei,
  • Qingxin Mu,
  • Hui Wang,
  • Guanyou Lin and
  • Miqin Zhang

19 July 2022

The assessment of the biodegradability of nanomaterials is of pragmatic importance for understanding the interactions between nanomaterials and biological systems and for the determination of ultimate fate of these materials as well as their potentia...

  • Article
  • Open Access
14 Citations
5,312 Views
15 Pages

Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor

  • Rui Gao,
  • Wenjun Zhang,
  • Junmin Jing,
  • Zhiwei Liao,
  • Zhou Zhao,
  • Bin Yao,
  • Huiyu Zhang,
  • Yuzhen Guo,
  • Yanbo Xu and
  • Chenyang Xue
  • + 3 authors

19 July 2022

Microelectromechanical system (MEMS) pressure sensors have a wide range of applications based on the advantages of mature technology and easy integration. Among them, piezoresistive sensors have attracted great attention with the advantage of simple...

  • Article
  • Open Access
1 Citations
2,096 Views
11 Pages

Using Algorithmic Transformations and Sensitivity Analysis to Unleash Approximations in CNNs at the Edge

  • Flavio Ponzina,
  • Giovanni Ansaloni,
  • Miguel Peón-Quirós and
  • David Atienza

19 July 2022

Previous studies have demonstrated that, up to a certain degree, Convolutional Neural Networks (CNNs) can tolerate arithmetic approximations. Nonetheless, perturbations must be applied judiciously, to constrain their impact on accuracy. This is a cha...

  • Article
  • Open Access
12 Citations
2,942 Views
14 Pages

Preparation of Micro-Pit-Textured PCD Tools and Micro-Turning Experiment on SiCp/Al Composites

  • Xu Wang,
  • Valentin L. Popov,
  • Zhanjiang Yu,
  • Yiquan Li,
  • Jinkai Xu,
  • Qiang Li and
  • Huadong Yu

19 July 2022

Serious tool wear occurs very often during machining due to the reinforcing phases in the workpiece. In this study, micro-pit-textures were prepared on the surfaces of PCD tools with a nanosecond laser to improve their cutting performance on SiCp/Al...

  • Article
  • Open Access
4 Citations
2,222 Views
11 Pages

Enhanced Deep Ultraviolet Photoresponse in Ga doped ZnMgO Thin Film

  • Mao Ye,
  • Dongbo Wang,
  • Shujie Jiao and
  • Lang Chen

19 July 2022

High Mg content (60%) ZnMgO samples with and without Ga dope were grown by an RF magnetron sputtering system. The effect of Ga dope on the ZnMgO sample and the respective ultraviolet photodetectors (UVPD) device’s performance were carefully stu...

  • Review
  • Open Access
23 Citations
4,639 Views
16 Pages

Cashew Gum: A Review of Brazilian Patents and Pharmaceutical Applications with a Special Focus on Nanoparticles

  • Ricardo G. Amaral,
  • Lucas R. Melo de Andrade,
  • Luciana N. Andrade,
  • Kahynna C. Loureiro,
  • Eliana B. Souto and
  • Patrícia Severino

18 July 2022

Natural polysaccharides are structures composed of highly diversified biological macromolecules whose properties have been exploited by a diversity of industries. Until 2018, the polysaccharides market raised more than US $ 12 billion worldwide, whil...

  • Article
  • Open Access
14 Citations
4,554 Views
8 Pages

18 July 2022

Over the past few decades, NAND flash memory has advanced with exponentially-increasing bit growth. As bit cells in 3D NAND flash memory are stacked up and scaled down together, some potential challenges should be investigated. In order to reasonably...

  • Article
  • Open Access
1 Citations
2,645 Views
13 Pages

18 July 2022

High-speed digital microsystems has emerged as one of the most important solutions for improving system performance, bandwidth, and power consumption. Based on mature micro-system processing technology, a material extraction approach for silicon inte...

  • Article
  • Open Access
22 Citations
5,584 Views
12 Pages

18 July 2022

Dragonflies are agile and efficient flyers that use two pairs of wings for demonstrating exquisite aerial maneuvers. Compared to two-winged insects such as bees or flies, dragonflies leverage forewing and hindwing interactions for achieving higher ef...

  • Article
  • Open Access
20 Citations
3,057 Views
15 Pages

18 July 2022

Laser additive manufacturing (LAM) of complex-shaped metallic components offers great potential for fabricating customized endovascular stents. In this study, anti-tetrachiral auxetic stents with negative Poisson ratios (NPR) were designed and fabric...

  • Article
  • Open Access
4 Citations
2,715 Views
11 Pages

18 July 2022

Micromotors have spread widely in order to meet the needs of new applications, including cell operation, drug delivery, biosensing, precise surgery and environmental decontamination, due to their small size, low energy consumption and large propellin...

  • Article
  • Open Access
2 Citations
2,238 Views
12 Pages

An Analytic Orthotropic Heat Conduction Model for the Stretchable Network Heaters

  • Zeqing He,
  • Yingli Shi,
  • Jin Nan,
  • Zhigang Shen,
  • Taihua Zhang and
  • Zhao Zhao

18 July 2022

Compared with other physiotherapy devices, epidermal electronic systems (EES) used in medical applications such as hyperthermia have obvious advantages of conformal attachment, lightness and high efficiency. The stretchable flexible electrode is an i...

  • Feature Paper
  • Article
  • Open Access
12 Citations
5,101 Views
14 Pages

Lasered Graphene Microheaters Modified with Phase-Change Composites: New Approach to Smart Patch Drug Delivery

  • Victoria Gilpin,
  • Deetchaya Surandhiran,
  • Cameron Scott,
  • Amy Devine,
  • Jill H. Cundell,
  • Chris I. R. Gill,
  • L. Kirsty Pourshahidi and
  • James Davis

18 July 2022

The combination of paraffin wax and O,O′-bis(2-aminopropyl) polypropylene glycol–block–polyethylene glycol–block–polypropylene glycol was used as a phase-change material (PCM) for the controlled delivery of curcumin. The PCM was combined with a graph...

  • Article
  • Open Access
7 Citations
4,066 Views
13 Pages

17 July 2022

This paper demonstrated a microwave-assisted solvent bonding method that uses organic solvent to seal the thermoplastic substrates with microwave assistance. This direct bonding is a simple and straightforward process that starts with solvent applica...

  • Article
  • Open Access
22 Citations
4,322 Views
19 Pages

17 July 2022

Due to the massive multipath effects and non-line-of-sight (NLOS) signal receptions, the accuracy and reliability of GNSS positioning solution can be severely degraded in a highly urbanized area, which has a negative impact on the performance of GNSS...

  • Review
  • Open Access
23 Citations
4,801 Views
28 Pages

A Review on Additive Manufacturing of Functional Gradient Piezoceramic

  • Anton Sotov,
  • Artem Kantyukov,
  • Anatoliy Popovich and
  • Vadim Sufiiarov

17 July 2022

Functionally graded piezoceramics are a new generation of engineering materials whose final properties are determined by a chemical composition gradient (volume distribution), material microstructure, or design characteristics. This review analyzes p...

  • Article
  • Open Access
10 Citations
2,541 Views
12 Pages

Effects of Laser Machining Aluminum Alloy in Different Media

  • Xiang Li,
  • Shan Huang,
  • Jianping Tang,
  • Weihao Mu,
  • Xin Xu and
  • Xuehui Chen

17 July 2022

To study the effects of aluminum alloys processed by a laser in air and water and at different water velocities, corresponding experiments were conducted and the impacting effects of different water velocities on the surface of the workpiece were sim...

  • Article
  • Open Access
5 Citations
3,420 Views
14 Pages

A Microfluidic System of Gene Transfer by Ultrasound

  • Cuimin Sun,
  • Menghua Zhang,
  • Guangyong Huang,
  • Ping Zhang,
  • Ronghui Lin,
  • Xiangjun Wang and
  • Hui You

16 July 2022

Ultrasonic gene transfer has advantages beyond other cell transfer techniques because ultrasound does not directly act on cells, but rather pushes the gene fragments around the cells into cells through an acoustic hole effect. Most examples reported...

  • Article
  • Open Access
1 Citations
2,187 Views
11 Pages

A Comparative Study on Optofluidic Fenton Microreactors Integrated with Fe-Based Materials for Water Treatment

  • Lijun Liu,
  • Ning Wang,
  • Liang Wan,
  • Chao Zhao,
  • Kunpeng Niu,
  • Dajuan Lyu,
  • Zhaolong Liao and
  • Biao Shui

16 July 2022

The catalysts employed in catalytic reactors greatly affect the reaction efficiency of the reaction system and the reactor’s performance. This work presents a rapid comparative study on three kinds of Fe-based materials integrated into an optof...

  • Feature Paper
  • Review
  • Open Access
13 Citations
4,257 Views
21 Pages

Circuit-Based Design of Microfluidic Drop Networks

  • Nassim Rousset,
  • Christian Lohasz,
  • Julia Alicia Boos,
  • Patrick M. Misun,
  • Fernando Cardes and
  • Andreas Hierlemann

16 July 2022

Microfluidic-drop networks consist of several stable drops—interconnected through microfluidic channels—in which organ models can be cultured long-term. Drop networks feature a versatile configuration and an air–liquid interface (AL...

  • Review
  • Open Access
65 Citations
9,702 Views
18 Pages

16 July 2022

Graphene-based nanomaterials have gained a lot of interest over the last years in flexible electronics due to their exceptional electrical, mechanical, and optoelectronic properties, as well as their potential of surface modification. Their flexibili...

  • Article
  • Open Access
15 Citations
2,739 Views
10 Pages

The Effect of Different Pulse Widths on Lattice Temperature Variation of Silicon under the Action of a Picosecond Laser

  • Jianjun Yang,
  • Decheng Zhang,
  • Jinye Wei,
  • Lingling Shui,
  • Xinjin Pan,
  • Guangren Lin,
  • Tiande Sun and
  • Yicheng Tang

15 July 2022

In laser processing, due to the short interaction time between an ultrashort pulse laser and silicon, it has been difficult to study the lattice temperature change characteristics of silicon. In this paper, the interaction between a picosecond laser...

  • Article
  • Open Access
10 Citations
4,026 Views
11 Pages

15 July 2022

In this study, we fabricated a poly(dimethylsiloxane) (PDMS) surface coated with polydopamine (PDA) to enhance cell adhesion. PDA is well known for improving surface adhesion on various surfaces due to the abundant reactions enabled by the phenyl, am...

  • Article
  • Open Access
11 Citations
3,264 Views
11 Pages

Investigation on Temperature Behavior for a GaAs E-pHEMT MMIC LNA

  • Qian Lin,
  • Lining Jia,
  • Haifeng Wu and
  • Xiaozheng Wang

15 July 2022

In order to investigate the temperature behavior for monolithic microwave integrated circuits (MMICs) under alpine conditions, the performance parameters of a 0.4–3.8 GHz gallium arsenide (GaAs) enhancement pseudomorphic high-electron-mobility...

  • Article
  • Open Access
8 Citations
2,501 Views
10 Pages

15 July 2022

Electrical impedance tomography (EIT) is a non-invasive, radiation-free imaging technique with a lot of promise in clinical monitoring. However, since EIT image reconstruction is a non-linear, pathological, and ill-posed issue, the quality of the rec...

  • Article
  • Open Access
40 Citations
6,697 Views
19 Pages

15 July 2022

SiC ceramics have excellent comprehensive properties and are typical hard and brittle materials that are difficult to process and are widely used in many fields. Laser polishing technology has developed into a new surface processing technology, and f...

  • Article
  • Open Access
5 Citations
2,780 Views
11 Pages

Frequency Scanning Dual-Mode Asymmetric Dual-OAM-Wave Generation Base on Broadband PB Metasurface

  • Jiayu Yu,
  • Qiurong Zheng,
  • Xueqin Tang,
  • Jie He,
  • Jie Liu,
  • Bin Zhang and
  • Kun Zou

15 July 2022

Increasing information capacity is significant for high-speed communication systems in a congested radio frequency sequence. Vortex waves carrying mode orthogonal orbital angular momentum (OAM) have gained considerable attention in recent years, owin...

  • Article
  • Open Access
14 Citations
2,949 Views
18 Pages

15 July 2022

In this work, based on the diffraction principle of reflective blazed grating, the structure size of the convex spherical blazed grating unit is determined, the machining accuracy of the convex spherical blazed grating is formulated, the effects of t...

  • Article
  • Open Access
11 Citations
2,876 Views
12 Pages

A General FEM Model for Analysis of Third-Order Nonlinearity in RF Surface Acoustic Wave Devices Based on Perturbation Theory

  • Baichuan Li,
  • Qiaozhen Zhang,
  • Xiangyong Zhao,
  • Shaotao Zhi,
  • Luyan Qiu,
  • Sulei Fu and
  • Weibiao Wang

15 July 2022

This article presents a general-purpose model that enables efficient and accurate calculation of third-order nonlinear signals in surface acoustic wave (SAW) devices. This model is based on piezoelectric constitutive equations combined with perturbat...

  • Article
  • Open Access
1 Citations
2,502 Views
18 Pages

Ergonomics Design and Assistance Strategy of A-Suit

  • Leiyu Zhang,
  • Xiang Gao,
  • Ying Cui,
  • Jianfeng Li,
  • Ruidong Ge,
  • Zhenxing Jiao and
  • Feiran Zhang

15 July 2022

Concerning the biomechanics and energy consumption of the lower limbs, a soft exoskeleton for the powered plantar flexion of the ankle, named A-Suit, was developed to improve walking endurance in the lower limbs and reduce metabolic consumption. The...

  • Article
  • Open Access
12 Citations
2,444 Views
17 Pages

15 July 2022

In this paper, spin-orbital conversion in the tight focus of an axial superposition of a high-order (order m) cylindrical vector beam and a beam with linear polarization is theoretically and numerically considered. Although such a beam does not have...

  • Article
  • Open Access
2 Citations
2,526 Views
9 Pages

15 July 2022

The increasing use of rapidly fluctuating renewable energy sources, such as sunlight, has necessitated the use of supercapacitors, which are a type of energy storage system with high power. Chemically exfoliated graphene oxide (GO) is a representativ...

  • Article
  • Open Access
1 Citations
2,183 Views
9 Pages

Design and Measurement of a Novel Overmoded TE01 Mode Converter for a Rectangular Gyro-TWT

  • Chaoxuan Lu,
  • Wei Jiang,
  • Zewei Wu,
  • Guo Liu,
  • Jianxun Wang,
  • Youlei Pu and
  • Yong Luo

15 July 2022

The rectangular gyrotron traveling wave tube (gyro-TWT) with a large aspect ratio (α) has the potential to achieve megawatt-class output power. As an essential component of gyro-TWT, a novel overmoded Ka-band mode converter with an α of 6...

  • Article
  • Open Access
7 Citations
3,850 Views
15 Pages

15 July 2022

Gas with ultrafine particle impaction on a solid surface is a unique case of curvilinear motion that can be widely used for the devices of surface coatings or instruments for particle size measurement. In this work, the Eulerian–Lagrangian meth...

  • Article
  • Open Access
8 Citations
2,403 Views
21 Pages

15 July 2022

The aluminum nanoparticle is adequate for power grid wiring, such as the distribution of local power and the transmission of aerial power lines, because of its higher conductivity. This nanoparticle is also one of the most commonly used materials in...

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Micromachines - ISSN 2072-666X