Open AccessProceeding Paper
1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration
by
Maxime Hermouet 1,2,*, Louise Banniard 1,2, Marc Sansa 1,2, Alexandre Fafin 1,2,3, Marc Gely 1,2, Sébastien Pauliac 1,2, Pierre Brianceau 1,2, Jacques-Alexandre Dallery 4, Pierre Etienne Allain 3, Eduardo Gil Santos 3, Ivan Favero 3, Thomas Alava 1,2, Guillaume Jourdan 1,2,* and Sébastien Hentz 1,2,*
1
Department de Physique, Université Grenoble Alpes, F38000 Grenoble, France
2
CEA, LETI, Minatec Campus, F-38054 Grenoble, France
3
Matériaux et Phénomènes Quantiques, Université Paris Diderot, CNRS UMR 7162, Sorbonne Paris Cité, 75013 Paris, France
4
Vistec Electron Beam GmbH, Ilmstrass 4, 07743 JENA, Germany
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Abstract
Cavity optomechanics have become a promising route towards the development of ultrasensitive sensors for a wide range of applications including mass, chemical and biological sensing. We demonstrate the potential of Very Large Scale Integration (VLSI) with state-of-the-art low-loss performance silicon optomechanical microdisks for
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Cavity optomechanics have become a promising route towards the development of ultrasensitive sensors for a wide range of applications including mass, chemical and biological sensing. We demonstrate the potential of Very Large Scale Integration (VLSI) with state-of-the-art low-loss performance silicon optomechanical microdisks for real-world applications. We report microdisks exhibiting optical Whispering Gallery Modes (WGM) with 1 million quality factors. These high-Q microdisks allow their Brownian motion to be resolved at few 100 MHz in ambient air. Such performance shows our VLSI process is a viable approach for the next generation of high-end sensors operating in vacuum, gas or liquid phase.
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